KX022-1020 Datasheet, PDF (12/75 Pages) List of Unclassifed Manufacturers – Accelerometer Specifications

± 2g / 4g / 8g Tri-axis Digital
Accelerometer Specifications
PART NUMBER:
KX022-1020
Rev. 11.0
10-Sep-15
Functionality
Sense element
The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology.
This process technology allows Kionix to create mechanical silicon structures which are essentially
mass-spring systems that move in the direction of the applied acceleration. Acceleration sensing is
based on the principle of a differential capacitance arising from the acceleration-induced motion.
Capacitive plates on the moving mass move relative to fixed capacitive plates anchored to the
substrate. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid
wafer to the device using a glass frit.
ASIC interface
A separate ASIC device packaged with the sense element provides all of the signal conditioning and
communication with the sensor. The complete measurement chain is composed by a low-noise
capacitance to voltage amplifier which converts the differential capacitance of the MEMS sensor into
an analog voltage that is sent through an analog-to-digital converter. The acceleration data may be
accessed through the I²C digital communications provided by the ASIC. In addition, the ASIC contains
all of the logic to allow the user to choose data rates, g-ranges, filter settings, and interrupt logic. Plus,
there are two programmable state machines which allow the user to create unique embedded functions
based on changes in acceleration.
Factory calibration
Kionix trims the offset and sensitivity of each accelerometer by adjusting gain (sensitivity) and 0-g
offset trim codes stored in nonvolatile memory (OTP). Additionally, all functional register default values
are also programmed into the nonvolatile memory. Every time the device is turned on or a software
reset command is issued, the trimming parameters and default register values are downloaded into the
volatile registers to be used during active operation. This allows the device to function without further
calibration.
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