4082F Datasheet, PDF (18/23 Pages) Keysight Technologies – Flash Memory Cell Parametric Test System

18 | Keysight | 4082F Flash Memory Cell Parametric Test System – Data Sheet
Keysight E4980A LCR meter
Measurement accuracy is speciied between any two measurement pins except the chuck connection pin and after calibration data
measurement and offset cancel.
C/G measurement range, resolution, and accuracy
Frequency C range
1 MHz
10 pF¹
C accuracy
% of reading + % of range
0.8% + [1.0 + (0.6 × Gm² /63 μS)]%
100 pF
0.8% + [0.3 + (0.6 × Gm/630 μS)]%
100 kHz
1 nF
10 pF¹
1.5% + [0.2 + (1.7 × Gm/6.3 mS)]%
0.4% + [1.0 + (0.3 × Gm/6.3 μS)]%
100 pF
0.3% + [0.3 + (0.3 × Gm/63 μS)]%
1 nF
0.3% + [0.2 + (0.4 × Gm/630 μS)]%
10 nF
0.5% + [0.2 + 1.0 × (Gm/6.3 mS)]%
10 kHz 100 pF
0.3% + [0.2 + (0.3 × Gm/6.3 μS)]%
1 nF
0.3% + [0.1 + (0.3 × Gm/63 μS)]%
10 nF
0.3% + [0.1 + (0.3 × Gm/630 μS)]%
100 nF
0.3% + [0.1 + (1.0 × Gm/6.3 mS)]%
1 kHz
100 pF¹
0.4% + [0.5 +(0.4 × Gm/0.63 μS)]%
1 nF
0.3% + [0.1 + (0.3 × Gm/6.3 μS )]%
10 nF
0.3% + [0.1 + (0.3 × Gm/63 μS)]%
100 nF
0.3% + [0.1 + (0.3 × Gm/630 μS)]%
G range
63 μS¹
630 μS
6.3 mS
6.3 μS¹
63 μS
630 μS
6.3 mS
6.3 μS
63 μS
630 μS
6.3 mS
0.63 μS¹
6.3 μS
63 μS
630 μS
G accuracy
% of reading + % of range
0.8% + [1.0 + (0.6 × Cm³/10 pF)]%
0.8% + [0.3 + (0.6 × Cm/100 pF)]%
1.3% + [0.2 + (2.2 × Cm/1 nF)]%
0.4% + [1.0 + (0.4 × Cm/10 pF)]%
0.3% + [0.3 + (0.3 × Cm/100 pF)]%
0.3% + [0.2 + (0.4 × Cm/1 nF)]%
0.7% + [0.2 + (0.8 × Cm/10 nF)]%
0.3% + [0.2 + (0.3 × Cm/100 pF)]%
0.3% + [0.1 + (0.3 × Cm/1 nF)]%
0.3% + [0.1 + (0.3 × Cm/10 nF)]%
0.7% + [0.1 + (0.7 × Cm/100 nF)]%
0.4% + [0.5 + (0.4 × Cm/100 pF)]%
0.3% + [0.1 + (0.3 × Cm/1 nF)]%
0.3% + [0.1 + (0.3 × Cm/10 nF)]%
0.3% + [0.1 + (0.3 × Cm/100 nF)]%
1. Supplemental characteristics
2. Gm = Measured conductance
3. Cm = Measured capacitance
Note: Accuracy is speciied between any DUT pins. Stray capacitance between force and guard must be under 5 pF.
Frequency accuracy: ±0.1%; Test signal level: 30 mVrms ± 5 mVrms.
When measurement speed is set to SHORT, add 0.25% to the % of reading and 0.1% to the % of range.
When open/short calibrations at the DUT pins are carried out, accuracy is the same as in the above table. (Note that the length of
cable from the output pins must be less than 1 meter, and capacitance to guard must be under 100 pF.