4082F Datasheet, PDF (14/23 Pages) Keysight Technologies – Flash Memory Cell Parametric Test System

14 | Keysight | 4082F Flash Memory Cell Parametric Test System – Data Sheet
SMU other speciications
Over current range
Over voltage range
Current compliance setting range
Accuracy of converse polar current limit:³
Maximum capacitive load
Maximum allowable guard capacitance
Maximum slew rate
15% of range (0% for 100 mA range of MPSMU/HRSMU, 0% for 1 A range of HPSMU,
5% for 10 pA/100 pA range of HRSMU)
V force: % of range
V measure: 10% of range (0% for 100 V range of MPSMU, 0% for 200 V range of HPSMU)
1 pA to maximum current
±2% of range (100 nA to 1 A ranges)
±10% of range (10 pA to 10 nA ranges)
≤ 1000 pF
250 pF (between signal line and guard line outside of matrix)
0.2 V/μs
Current (mA)
100
50
-100 -40 -20
20
Voltage (V)
20 40 100
-20
-50
-100
Current (mA)
1000
700
350
125
-200 -100 -40 -20 -14
50
14 20 40
-50
Voltage (V)
100 200
-125
-350
-700
Using MPSMU/HRSMU
GNDU
This unit is used for ground when making measurements.
-1000
Using HPSMU
Speciications
Output voltage
Maximum current
Offset voltage
Maximum capacitance load
0V
±1.6 A
±200 μV
1 μF (supplemental characteristics)
Digital volt meter (Keysight 3458A)
Voltage measurement range, resolution, and accuracy (at number of power line cycles ≥ 1)
Speciications
Full-scale voltage range
0.1 V
1V
10 V
100 V
Resolution
0.1 μV
1 μV
10 μV
100 μV
Accuracy (% of reading + volt)
0.01% + 100 μV
0.01% + 100 μV
0.01% + 200 μV
0.02% + 1 mV