4082F Datasheet, PDF (13/23 Pages) Keysight Technologies – Flash Memory Cell Parametric Test System

13 | Keysight | 4082F Flash Memory Cell Parametric Test System – Data Sheet
Current source/monitor range, resolution, and accuracy using an MPSMU or HPSMU connected to ports SMU3 to SMU8
Full scale
current range
Force resolution
Measure resolution: Measure resolution: Force accuracy
high speed
precision
Measure accuracy
±1 A¹
50 μA
50 μA
1 μA
a: 0.5%
b: 0.1 + 0.0005 × Vo%
c: 0
a: 0.5%
b: 0.05 + 0.0005 × Vo %
c: 0
±100 mA
±10 mA
±1 mA
5 μA
500 nA
50 nA
5 μA
500 nA
50 nA
100 nA
10 nA
1 nA
a: 0.12%
b: 0.1 + 0.0005 × Vo%
c: 0
a: 0.1%
b: 0.05 + 0.0005 × Vo %
c: 0
±100 μA
5 nA
5 nA
100 pA
±10 μA
500 pA
500 pA
10 pA
±1 μA
±100 nA
50 pA
5 pA
50 pA
5 pA
1 pA
100 fA
a: 0.2%
b: 0.1 + 0.0005 × Vo%
c: 300 pA + 10 pA/V × Vo
a: 0.2%
b: 0.05 + 0.0005 × Vo %
c: 300 pA + 10 pA/V × Vo
±10 nA²
500 fA
500 fA
10 fA
±1 nA²
50 fA
50 fA
10 fA
a: 1%
b: 0.1 + 0.0005 × Vo%
c: 303 pA + 10 pA/V × Vo
a: 1%
b: 0.1 + 0.0005 × Vo %
c: 303 pA + 10 pA/V × Vo
1. Using HPSMU
2. Supplemental characteristics when using the SMU3 to SMU8 ports
Note: Force accuracy is calculated as follows: ±(a% of output setting value + b% of output current range + c) (A)
Measure accuracy is calculated as follows: ±(a% of measured value + b% of current measurement range + c) (A)
Note: The HPSMU can only be connected to the SMU3 and SMU4 ports.
Note: Current measurement accuracy of the SMU may be affected by electromagnetic ield strength over 3 V/m at a frequency of
80 MHz to 1 GHz. Vo = Output voltage