4082A Datasheet, PDF (9/21 Pages) Keysight Technologies – Parametric Test System

09 | Keysight | 4082A Parametric Test System - Data Sheet
DC Measurement Subsystem
SMU (Source and monitor unit)
Voltage source/monitor range, resolution, and accuracy using HRSMU
Full scale
voltage range
Force resolution
Measure resolution:
high speed
Measure resolution
precision
±2 V
100 μV
100 μV
2 μV
±20 V
1 mV
1 mV
±40 V
2 mV
2 mV
±100 V
5 mV
5 mV
20 μV
40 μV
100 μV
Voltage source/monitor range, resolution, and accuracy using MPSMU and HPSMU
Full scale
voltage range
Force resolution Measure resolution:
high speed
Measure resolution
precision
±2 V
100 μV
100 μV
2 μV
±20 V
±40 V
±100 V
±200 V¹
1 mV
2 mV
5 mV
10 mV
1 mV
2 mV
5 mV
10 mV
20 μV
40 μV
100 μV
200 μV
Measure accuracy
a: 0.02%
b: 0.025%
c: Rmat × Io
a: 0.02%
b: 0.015%
c: Rmat × Io
Measure accuracy
a: 0.05%
b: 0.05%
c: Rmat × Io
1. Using HPSMU
Note: Force accuracy is calculated as follows: ±(a% of output setting value + b% of output voltage range + c) (V)
Measure accuracy is calculated as follows: ±(a% of measure value + b% of measurement voltage range + c) (V)
Io = Output current, Rmat = Residual resistance of switching matrix force port
Note: Rmat is different at each port. When using prober chuck connection pin, add 0.1 Ω to Rmat.
Low current port (SMU1 and SMU2): 1.0 Ω
Kelvin port: (SMU3 to SMU6); 3 mΩ
Non-Kelvin port (SMU7 and SMU8): 1.0 Ω
Force accuracy
a: 0.03%
b: 0.035%
c: Rmat × Io
a: 0.03%
b: 0.02%
c: Rmat × Io
Force accuracy
a: 0.04%
b: 0.04%
c: Rmat × Io
a: 0.045%
b: 0.04%
c: Rmat × Io