4082A Datasheet, PDF (10/21 Pages) Keysight Technologies – Parametric Test System

10 | Keysight | 4082A Parametric Test System - Data Sheet
Current source/monitor range, resolution, and accuracy using an MPSMU connected to ports SMU1 and SMU2
Full scale
current range
±100 mA
±10 mA
±1 mA
±100 μA
±10 μA
±1 μA
±100 nA
±10 nA
±1 nA
Force resolution
5 μA
500 nA
50 nA
5 nA
500 pA
50 pA
5 pA
Measure resolution:
high speed
5 μA
500 nA
50 nA
5 nA
500 pA
50 pA
5 pA
500 fA
50 fA
500 fA
50 fA
Measure resolution:
precision
100 nA
10 nA
1 nA
100 pA
10 pA
1 pA
100 fA
10 fA
10 fA
Force accuracy
a: 0.12%
b: 0.1 + 0.0005 × Vo %
c: 0
a: 0.2%
b: 0.1 + 0.0005 ×Vo %
c: 0.02 pA/V × Vo
a: 1%
b: 0.1 + 0.0005 × Vo %
c: 3 pA + 0.02 pA/V × Vo
Measure accuracy
a: 0.1%
b: 0.05 + 0.0005 × Vo %
c: 0
a: 0.2%
b: 0.05 + 0.0005 × Vo %
c: 0.02 pA/V × Vo
a: 1%
b: 0.1 + 0.0005 × Vo %
c: 3 pA + 0.02 pA/V × Vo
Note: The HPSMU cannot be connected to SMU1 and SMU2 ports.
Current measurement accuracy of the SMU may be affected by elecromagnetic ield strength over 3 V/m at a frequency of 80 MHz to 1 GHz.