4082A Datasheet, PDF (17/21 Pages) Keysight Technologies – Parametric Test System

17 | Keysight | 4082A Parametric Test System - Data Sheet
Keysight E4980A LCR meter
Measurement accuracy is specified between any two measurement pins except the chuck connection pin and after calibration data
measurement and offset cancel.
C/G measurement range, resolution, and accuracy
Frequency
C range
C accuracy
% of reading + % of range
1 MHz
100 kHz
10 kHz
1 kHz
10 pF¹
100 pF
1 nF
10 pF¹
100 pF
1 nF
10 nF
100 pF
1 nF
10 nF
100 nF
100 pF¹
1 nF
10 nF
100 nF
0.8% + [1.0 + (0.6 × Gm² /63 μS)]%
0.8% + [0.3 + (0.6 × Gm/630 μS)]%
1.5% + [0.2 + (1.7 × Gm/6.3 mS)]%
0.4% + [1.0 + (0.3 × Gm/6.3 μS)]%
0.3% + [0.3 + (0.3 ´ Gm/63 μS)]%
0.3% + [0.2 + (0.4 × Gm/630 μS)]%
0.5% + [0.2 + 1.0 × (Gm/6.3 mS)]%
0.3% + [0.2 + (0.3 × Gm/6.3 μS)]%
0.3% + [0.1 + (0.3 × Gm/63 μS)]%
0.3% + [0.1 + (0.3 × Gm/630 μS)]%
0.3% + [0.1 + (1.0 × Gm/6.3 mS)]%
0.4% + [0.5 +(0.4 × Gm/0.63 μS)]%
0.3% + [0.1 + (0.3 × Gm/6.3 μS )]%
0.3% + [0.1 + (0.3 × Gm/63 μS)]%
0.3% + [0.1 + (0.3 × Gm/630 μS)]%
G range
63 μS¹
630 μS
6.3 mS
6.3 μS¹
63 μS
630 μS
6.3 mS
6.3 μS
63 μS
630 μS
6.3 mS
0.63 μS¹
6.3 μS
63 μS
630 μS
G accuracy
% of reading + % of range
0.8% + [1.0 + (0.6 × Cm³/10 pF)]%
0.8% + [0.3 + (0.6 × Cm/100 pF)]%
1.3% + [0.2 + (2.2 × Cm/1 nF)]%
0.4% + [1.0 + (0.4 × Cm/10 pF)]%
0.3% + [0.3 + (0.3 × Cm/100 pF)]%
0.3% + [0.2 + (0.4 × Cm/1 nF)]%
0.7% + [0.2 + (0.8 × Cm/10 nF)]%
0.3% + [0.2 + (0.3 × Cm/100 pF)]%
0.3% + [0.1 + (0.3 × Cm/1 nF)]%
0.3% + [0.1 + (0.3 × Cm/10 nF)]%
0.7% + [0.1 + (0.7 × Cm/100 nF)]%
0.4% + [0.5 + (0.4 × Cm/100 pF)]%
0.3% + [0.1 + (0.3 × Cm/1 nF)]%
0.3% + [0.1 + (0.3 × Cm/10 nF)]%
0.3% + [0.1 + (0.3 × Cm/100 nF)]%
1. Supplemental characteristics
2. Gm = Measured conductance
3. Cm = Measured capacitance
Note: Accuracy is speciied between any DUT pins. Stray capacitance between force and guard must be under 5 pF.
Frequency accuracy: ±0.1%; Test signal level: 30 mV_rms ± 5 mV_rms
When measurement speed is set to SHORT, add 0.25% to the % of reading and 0.1% to the % of range.
When open/short calibrations at the DUT pins are carried out, accuracy is the same as in the above table. (Note that the length of cable from the
output pins must be less than 1 meter, and capacitance to guard must be under 100 pF.