4082A Datasheet, PDF (12/21 Pages) Keysight Technologies – Parametric Test System

12 | Keysight | 4082A Parametric Test System - Data Sheet
Current source/monitor range, resolution, and accuracy using an MPSMU or HPSMU connected to ports SMU3 to SMU8
Full scale
current range
±1 A¹
±100 mA
±10 mA
±1 mA
±100 μA
±10 μA
±1 μA
±100 nA
±10 nA²
±1 nA2
Force resolution
50 μA
Measure resolution:
high speed
50 μA
5 μA
500 nA
50 nA
5 nA
500 pA
50 pA
5 pA
5 μA
500 nA
50 nA
5 nA
500 pA
50 pA
5 pA
500 fA
50 fA
500 fA
50 fA
Measure resolution:
precision
1 μA
100 nA
10 nA
1 nA
100 pA
10 pA
1 pA
100 fA
10 fA
10 fA
Force accuracy
Measure accuracy
a: 0.5%
b: 0.1 + 0.0005 × Vo%
c: 0
a: 0.12%
b: 0.1 + 0.0005 × Vo%
c: 0
a: 0.5%
b: 0.05 + 0.0005 × Vo %
c: 0
a: 0.1%
b: 0.05 + 0.0005 × Vo %
c: 0
a: 0.2%
b: 0.1 + 0.0005 × Vo%
c: 300 pA + 10 pA/V
× Vo
a: 1%
b: 0.1 + 0.0005 × Vo%
c: 303 pA + 10 pA/V
× Vo
a: 0.2%
b: 0.05 + 0.0005 × Vo %
c: 300 pA + 10 pA/V × Vo
a: 1%
b: 0.1 + 0.0005 × Vo %
c: 303 pA + 10 pA/V × Vo
1. Using HPSMU
2. Supplemental characteristics when using the SMU3 to SMU8 ports
Note: Force accuracy is calculated as follows: ±(a% of output setting value + b% of output current range + c) (A)
Measure accuracy is calculated as follows: ±(a% of measured value + b% of current measurement range + c) (A)
Note: The HPSMU can only be connected to the SMU3 and SMU4 ports.
Note: Current measurement accuracy of the SMU may be affected by elecromagnetic ield strength over 3 V/m at a frequency of 80 MHz to 1 GHz.
Vo = Output voltage