4082A Datasheet, PDF (15/21 Pages) Keysight Technologies – Parametric Test System

15 | Keysight | 4082A Parametric Test System - Data Sheet
Capacitance Measurement Subsystem
High-speed CMU (Capacitance measurement unit)
Measurement accuracy is speciied between any two measurement pins except the chuck connection pin.
Speciications
Measurement range
Measurement frequency
Test signal level
DC bias
Full-scale voltage range
Force accuracy
C/G measurement range, resolution, and accuracy
1 fF to 1.2 nF and 10 nS to 7.5 mS (1 MHz)
1 fF to 10 nF and 1 nS to 6.3 mS (100 kHz)
1 fF to 100 nF and 0.1 nS to 6.3 mS (10 kHz)
10 fF to 100 nF and 0.1 nS to 63 mS (1 kHz)
Setting range 1 kHz to 2 MHz (34 points)
Setting range 10 mV, 30 mV, 50 mV, and 100 mV
±10 V (Setting resolution: 1 mV)
±(0.1% of setting + 10 mV)
Frequency C range
C accuracy
±(% of reading + % of range)
G range
G accuracy
±(% of reading + % of range)
2 MHz*
1 MHz
100 kHz
10 kHz
1 kHz
7 pF
70 pF
10 pF*
100 pF
1 nF
10 pF*
100 pF
1 nF
10 nF
100 pF
1 nF
10 nF
100 nF
100 pF*
1 nF
10 nF
100 nF
3.2% + [6.3 + (2.3 × Gm/88 μS)]%
2.8% + [2.3 + (1.9 × Gm/880 μS)]%
0.8% + [1.1 + (0.6 × Gm/63 μS)]%
0.7% + [0.4 + (0.5 × Gm/630 μS)]%
1.5% + [0.3 + (2.1 × Gm/6.3 mS)]%
0.4% + [1.1 + (0.3 × Gm/6.3 μS)]%
0.2% + [0.4 + (0.2 × Gm/63 μS)]%
0.2% + [0.3 + (0.4 × Gm/630 μS)]%
0.5% + [0.3 + (1.0 × Gm/6.3 mS)]%
0.3% + [0.2 + (0.3 × Gm/6.3 μS)]%
0.2% + [0.2 + (0.2 × Gm/63 μS)]%
0.2% + [0.2 + (0.2 × Gm/630 μS)]%
0.3% + [0.2 + (1.0 × Gm/6.3 mS)]%
0.3% + [0.4 +(0.3 × Gm/0.63 μS)]%
0.3% + [0.1 + (0.3 × Gm/6.3 μS )]%
0.3% + [0.1 + (0.3 × Gm/63 μS)]%
0.3% + [0.1 + (0.3 × Gm/630 μS)]%
88 μS
880 μS
63 μS*
630 μS
6.3 mS
6.3 μS*
63 μS
630 μS
6.3 mS
6.3 μS
63 μS
630 μS
6.3 mS
0.63 μS*
6.3 μS
63 μS
630 μS
3.2% + [6.5 + (2.5 × Cm/7 pF)]%
2.8% + [2.4 + (2.1 × Cm/70 pF)]%
0.8% + [1.1 + (0.6 × Cm/10 pF)]%
0.7% + [0.4 + (0.5 × Cm/100 pF)]%
1.5% + [0.3 + (2.2 × Cm/1 nF)]%
0.4% + [1.1 + (0.4 × Cm/10 pF)]%
0.2% + [0.4 + (0.2 × Cm/100 pF)]%
0.2% + [0.3 + (0.4 × Cm/1 nF)]%
0.5% + [0.3 + (1.0 × Cm/10 nF)]%
0.3% + [0.2 + (0.3 × Cm/100 pF)]%
0.2% + [0.2 + (0.2 × Cm/1 nF)]%
0.2% + [0.2 + (0.2 × Cm/10 nF)]%
0.7% + [0.2 + (0.7 × Cm/100 nF)]%
0.3% + [0.4 + (0.3 × Cm/100 pF)]%
0.3% + [0.1 + (0.3 × Cm/1 nF)]%
0.3% + [0.1 + (0.3 × Cm/10 nF)]%
0.3% + [0.1 + (0.3 × Cm/100 nF)]%
* Supplemental characteristics
Gm: Measured conductance
Cm: Measured capacitance
Conductance and capacitance measurements are specified under the following conditions:
– Measurement frequency: 1 kHz, 10 kHz, 100 kHz, or 1 MHz
– Integration time: MEDIUM or LONG
– Test signal level: 30 mVrms
– Stray capacitance: Must be under 5 pF between force and guard
– Calibration and offset cancel: Specifications are valid for the data after calibration data measurement and offset cancel.
– Capacitance measurement accuracy of HSCMU may be affected by conducted RF field strength over 3 Vrms at frequency range of 1 MHz to 20 MHz.