E32DC200E Datasheet, PDF (41/56 Pages) Omron Electronics LLC – 530 Watts ECL Series

Through-beam Fiber Units
Vacuum-resistant Models
E32-T51V
M4 × 0.7 * Two nuts
1.15 dia. M2.6 × 0.45
Two spring 4 dia.
washers
8
3
20
(30)
Optical fiber: 3 dia. ^{4 dia.}
2.2 dia.
1,000
Connected to flange
(vacuum side)
26
*Material: Aluminum
E32-T84SV
Lens (2 dia.)
Sensing head: 3 dia.*
(14.2)
12
12
30 max. 6
3.5 dia.
90°
R5
3 dia.
4 dia.
1,000
Flexible tube (stainless steel):
2.9 dia.
4 dia.
2.2 dia.
E32-VF4
36 dia.
49
24 8
26
Connected to flange (vacuum side)
*Material: Stainless steel (SUS304)
Four, 10 dia.
80
70 dia.
44 dia.
45°
80
Flange
V40 O-ring
Flange
90 dia.
Note 1. Perform mounting so that the V40 O-ring is on the atmospheric-
pressure side of the vacuum chamber wall.
2. Mounting-hole cutout dimensions: 38 dia. ±0.5 mm
E32-T54V
1.15 dia.
4
M2.6 × 0.45
3
12
4.5
18
3 dia. *
R9
(15)
4 5 dia. 4 dia.
(3)
E39-F1V
1,000
3 dia.
4 dia.
2.2 dia.
26
Connected to flange (vacuum side)
*Material: Stainless steel (SUS304)
0.5-dia. hole
8.9
4 dia.
6
M2.6 × 0.45
Effective depth: 3.8
Spot-facing depth: 0.9
E32-VF1
(96)
(63)
10 (23)
22
5
22
30
20 dia.
19
One nut M14 × 2
Two, connectors
One spring V15 O-ring
washer
6 (33.53)
Note 1. Perform mounting so that the V15 O-ring is on the atmospheric-pres-
sure side of the vacuum chamber wall.
2. Mounting-hole cutout dimensions: 14.5 dia. ±0.2 mm
41