E5263A Datasheet, PDF (7/15 Pages) Keysight Technologies – 2 Channel IV Analyzer/Source Monitor Unit

07 | Keysight | E5262A 2 Channel IV Analyzer Source Monitor Unit, E5263A 2 Channel IV Analyzer Source Monitor Unit – Data Sheet
Power consumption (HPSMU)
HPSMU measurement and output range
Current (mA)
Voltage source mode:
1000
Voltage range
Power
2V
20 x Ic (W)
20 V
20 x Ic (W)
40 V
40 x Ic (W)
100 V
100 x Ic (W)
200 V
200 x Ic (W)
Where Ic is the current compliance setting.
Current source mode:
Voltage compliance Power
Vc ≤ 20
20 x Io (W)
20 < Vc ≤ 40
40 x Io (W)
40 < Vc ≤ 100
100 x Io (W)
100 < Vc ≤ 200
200 x Io (W)
Where Vc is the voltage compliance setting and Io is output current.
500
125
50
-200 -100 -40 -20
-50
-125
20 40 100 200
Voltage (V)
-500
-1000
HPSMU measurement and output range
Output terminal/connection:
Triaxial connector, Kelvin (remote sensing)
Voltage/current compliance (limiting)
The SMU can limit output voltage or current to prevent damaging
the device under test.
Voltage: 0 V to ± 200 V
Current: ± 100 pA to ± 1 A
Compliance accuracy: Same as the current (or voltage) set accuracy.
HPSMU supplemental information
Maximum allowable cable resistance (Kelvin connection):
Force line: 10 Ω (I ≤ 100 mA)
Force line: 1.5 Ω (100 mA < I ≤ 1 A)
Sense line: 10 Ω (All cases)
Voltage source output resistance: 0.2 Ω typical (Force line,
non-Kelvin connection)
Voltage measurement input resistance: ≥ 10¹³ Ω
Current source output resistance: ≥ 10¹³ Ω (1 nA range)
Current compliance setting accuracy (for opposite polarity):
For 1 nA to 10 nA ranges: I setting accuracy ± 12 % of range
For 100 nA to 1 A ranges: I setting accuracy ± 2.5 % of range
Maximum capacitive load:
For 100 nA to 10 mA ranges: 10 nF
For 100 mA to 1 A ranges: 100 µF
Maximum guard capacitance: 900 pF
Maximum shield capacitance: 5000 pF
Maximum guard offset voltage: ± 1 mV
Noise characteristics (typical, filter ON):
Voltage source: 0.01 % of V range (rms)
Current source: 0.1 % of I range (rms)
Overshoot (typical, filter ON):
Voltage source: 0.03 % of V range
Current source: 1 % of I range
Range switching transient noise (typical, filter ON):
Voltage ranging: 250 mV
Current ranging: 10 mV
Slew rate: 0.2 V/µs
SMU pulse setting accuracy (fixed measurement range):
Width: 0.5 % + 50 µs
Period: 0.5 % + 100 µs
Trigger out delay (pulsed measurements):
0 to 32.7 ms with 100 µs resolution (< pulse width)