E5263A Datasheet, PDF (6/15 Pages) Keysight Technologies – 2 Channel IV Analyzer/Source Monitor Unit

06 | Keysight | E5262A 2 Channel IV Analyzer Source Monitor Unit, E5263A 2 Channel IV Analyzer Source Monitor Unit – Data Sheet
Output terminal/connection:
Triaxial connector, Kelvin (remote sensing)
Voltage/current compliance (limiting)
The SMU can limit output voltage or current to prevent damaging
the device under test.
Voltage: 0 V to ± 100 V
Current: ± 100 pA to ± 200 mA
Compliance accuracy: Same as the current (or voltage) set accuracy.
MPSMU supplemental information
Maximum allowable cable resistance (Kelvin connection):
Force Line: 10 Ω (I ≤ 100 mA)
Force Line: 1.5 Ω (100 mA < I ≤ 200 mA)
Sense Line: 10 Ω (All cases)
Voltage source output resistance:
0.3 Ω typical (Force line, non-Kelvin connection)
Voltage measurement input resistance: ≥ 10¹³ Ω
Current source output resistance: ≥ 10¹³ Ω (1 nA range)
Current compliance setting accuracy (for opposite polarity):
For 100 nA to 200 mA ranges: I setting accuracy ± 2.5 % of range
Maximum capacitive load:
For 100 nA to 10 mA ranges: 10 nF
For 100 mA to 200 mA ranges: 100 µF
Maximum guard capacitance: 900 pF
Maximum shield capacitance: 5000 pF
Maximum guard offset voltage: ± 1 mV
Noise characteristics (typical, filter ON):
Voltage source: 0.01 % of V range (rms)
Current source: 0.1 % of I range (rms)
Overshoot (typical, filter ON):
Voltage source: 0.03 % of V range
Current source: 1 % of I range
Range switching transient noise (typical, filter ON):
Voltage ranging: 250 mV
Current ranging: 10 mV
Slew rate: 0.2 V/µs
SMU pulse setting accuracy (fixed measurement range):
Width: 0.5 % + 50 µs
Period: 0.5 % + 100 µs
Trigger out delay (pulsed measurements):
0 to 32.7 ms with 100 µs resolution (< pulse width)
HPSMU (High Power SMU) Module Specifications
Voltage range, resolution, and accuracy (HPSMU)
Voltage range
Force resolution
Measure resolution Force accuracy¹
Measure accuracy¹ Maximum current
±2 V
100 µV
100 µV
±(0.03 % + 900 µV) ±(0.03 % + 700 µV) 1 A
±20 V
1 mV
1 mV
±(0.03 % + 4 mV)
±(0.03 % + 4 mV)
1A
±40 V
2 mV
2 mV
±(0.03 % + 7 mV)
±(0.03 % + 8 mV)
2
±100 V
5 mV
5 mV
±(0.04 % + 15 mV)
±(0.03 % + 20 mV)
3
±200 V
10 mV
10 mV
±(0.045 % + 30 mV) ±(0.035 % + 40 mV) ⁴
1.  ± (% of output/measured value + offset voltage V)
2.  1 A (Vo ≤ 20 V), 500 mA (20 V <Vo ≤ 40 V), Vo is the output voltage in volts.
3.  1 A (Vo ≤ 20 V), 500 mA (20 V <Vo ≤ 40 V), 125 mA (40 V < Vo ≤ 100 V), Vo is the output voltage in volts.
4.  1 A (Vo ≤ 20 V), 500 mA (20 V <Vo ≤ 40 V), 125 mA (40 V < Vo ≤ 100 V), 50 mA (100 V < Vo ≤ 200 V), Vo is the output voltage in volts.
Current range, resolution, and accuracy (HPSMU)
Current Force
Measure
Maximum
range
resolution resolution Force accuracy^1,2
Measure accuracy^1,2
voltage
±100 nA 5 pA
5 pA
±(0.12 % + 50 pA + 5 pA x (Vo/25))
±(0.1 % + 30 pA + 5 pA x (Vo/25))
200 V
±1 µA
50 pA
50 pA
±(0.12 % + 400 pA + 50 pA x (Vo/25))
±(0.1 % + 200 pA + 50 pA x (Vo/25))
200 V
±10 µA
500 pA
500 pA
±(0.12 % + 5 nA + 500 pA x (Vo/25))
±(0.1 % + 3 nA + 500 pA x (Vo/25))
200 V
±100 µA 5 nA
5 nA
±(0.12 % + 40 nA + 5 nA x (Vo/25))
±(0.1 % + 20 nA + 5 nA x (Vo/25))
200 V
±1 mA
50 nA
50 nA
±(0.12 % + 500 nA + 50 nA x (Vo/25))
±(0.1 % + 300 nA + 50 nA x (Vo/25))
200 V
±10 mA
500 nA
500 nA
±(0.12 % + 4 µA + 500 nA x (Vo/25))
±(0.1 % + 2 µA + 500 nA x (Vo/25))
200 V
±100 mA 5 µA
5 µA
±(0.12 % + 50 µA + 5 µA x (Vo/25))
±(0.1 % + 30 µA + 5 µA x (Vo/25))
3
±1 A
50 µA
50 µA
±(0.5 % + 500 µA + 50 µA x (Vo/25))
±(0.5 % + 300 µA + 50 µA x (Vo/25))
4
5.  ± (% of output/measured value + offset current A (fixed part determined by the output/measurement range + proportional part that is multiplied by Vo)
6.  Round up below decimal point for the value of (Vo/25).
7.  200 V (Io ≤ 50 mA), 100 V (50 mA < Io ≤ 100 mA)
8.  200 V (Io ≤ 50 mA), 100 V (50 mA < Io ≤ 125 mA), 40 V (125 mA < Io ≤ 500 mA), 20 V (500 mA < Io ≤ 1 A), Io is the output current in amps.