E5263A Datasheet, PDF (5/15 Pages) Keysight Technologies – 2 Channel IV Analyzer/Source Monitor Unit

05 | Keysight | E5262A 2 Channel IV Analyzer Source Monitor Unit, E5263A 2 Channel IV Analyzer Source Monitor Unit – Data Sheet
MPSMU (Medium Power SMU) Module Specifications
Voltage range, resolution, and accuracy (MPSMU)
Force
Voltage range
resolution
Measure resolution Force accuracy¹
Measure accuracy¹
±2 V
100 µV
100 µV
±(0.03 % + 900 µV) ±(0.03 % + 700 µV)
±20 V
1 mV
1 mV
±(0.03 % + 4 mV)
±(0.03 % + 4 mV)
±40 V
2 mV
2 mV
±(0.03 % + 7 mV)
±(0.03 % + 8 mV)
±100 V
5 mV
5 mV
±(0.04 % + 15 mV)
±(0.03 % + 20 mV)
1.  ± (% of output/measured value + offset voltage)
2.  200 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), Vo is the output voltage in volts.
3.  200 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), 20 mA (40 V < Vo ≤ 100 V), Vo is the output voltage in volts.
Maximum current
200 mA
200 mA
2
3
Current range, resolution, and accuracy (MPSMU)
Force
Measure
Maximum
Current range resolution resolution⁴ Force accuracy¹
Measure accuracy^1,2
voltage
±100 nA
5 pA
5 pA
±(0.12 % + 50 pA + 5 pA x (Vo/25))
±(0.1 % + 30 pA + 5 pA x (Vo/25))
100 V
±1 µA
50 pA
50 pA
±(0.12 % + 400 pA + 50 pA x (Vo/25))
±(0.1 % + 200 pA + 50 pA x (Vo/25))
100 V
±10 µA
500 pA
500 pA
±(0.12 % + 5 nA + 500 pA x (Vo/25))
±(0.1 % + 3 nA + 500 pA x (Vo/25))
100 V
±100 µA
5 nA
5 nA
±(0.12 % + 40 nA + 5 nA x (Vo/25))
±(0.1 % + 20 nA + 5 nA x (Vo/25))
100 V
±1 mA
50 nA
50 nA
±(0.12 % + 500 nA + 50 nA x (Vo/25))
±(0.1 % + 300 nA + 50 nA x (Vo/25))
100 V
±10 mA
500 nA
500 nA
±(0.12 % + 4 µA + 500 nA x (Vo/25))
±(0.1 % + 2 µA + 500 nA x (Vo/25))
100 V
±100 mA
5 µA
5 µA
±(0.12 % + 50 µA + 5 µA x (Vo/25))
±(0.1 % + 30 µA + 5 µA x (Vo/25))
3
±200 mA
10 µA
10 µA
±(0.12 % + 100 µA + 10 µA x (Vo/50))
±(0.1 % + 60 µA + 10 µA x (Vo/50))
4
4.  ± (% of output/measured value + offset current A (fixed part determined by the output/measurement range + proportional part that is multiplied by Vo)
5.  Round up below decimal point for the value of (Vo/25) and (Vo/50)
6.  100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 200 mA), Io is the output current in amps.
Power consumption (MPSMU)
Voltage source mode:
Voltage range
Power
2V
20 x Ic (W)
20 V
20 x Ic (W)
40 V
40 x Ic (W)
100 V
100 x Ic (W)
Where Ic is the current compliance setting.
Current source mode:
Voltage compliance Power
Vc ≤ 20
20 x Io (W)
20 < Vc ≤ 40
40 x Io (W)
40 < Vc ≤ 100
100 x Io (W)
Where Vc is the voltage compliance setting and Io is output current.
MPSMU measurement and output range
Current (mA)
200
50
20
-100
-40 -20
20 40
100
-20
Voltage (V)
-50
-200
MPSMU measurement and output range