FMOL001DB Datasheet, PDF (3/6 Pages) Sensortechnics GmbH – Mass flow sensors for gases

FMO Series
Mass flow sensors for gases
FLOW SPECIFICATIONS
(V_S = 10 ±0.01 V, T_A = 25°C)
FMOM025HB
FMOL001DB
Press. Flow
(µbar) (sccm)⁶
Nom.
(mV)
Tol.
(± mV)
Press. Flow
(mbar) (sccm)⁶
20
30
9.9
1.5
2.23
1000
17
25
8.5
1.5
1.52
800
14
20
6.8
1.5
0.94
600
10
15
5.2
1.0
0.49
400
7
10
3.5
1.0
0.19
200
3
5
1.7
1.0
0.00
0
0
0
0.0
1.0
-0.19
-200
-0.49
-400
-0.94
-1.52
-2.23
-600
-800
-1000
Note:
6 _{Devices are calibrated in mass flow. Tolerance values apply to calibration type only.}
Nom.
(mV)
54.7
53.0
49.3
42.5
29.8
0.0
-29.8
-42.5
-49.3
-53.0
-55.2
Tol.
(± mV)
2.0
2.0
2.5
3.5
4.0
1.5
4.0
5.0
6.0
6.0
6.0
OUTPUT VS. FLOW CURVES
FMOM025HB
FMOL001DB
E / 11723 / A
3/6
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