FMOL001DB Datasheet, PDF (2/6 Pages) Sensortechnics GmbH – Mass flow sensors for gases

FMO Series
Mass flow sensors for gases
FLOW SENSOR CHARACTERISTICS³
(V_S = 10 ±0.01 V, T_A = 25°C)
Part no.
FMOM025HB
FMOL001DB
Flow range
(full scale)
±25 sccm
±1000 sccm
Max. flow
change⁴
5.0 l/sec
5.0 l/sec
Output voltage
@ trim point
8.5 ±1.5 mV @ 25 sccm
54.7 ±3.7 mV @ 1000 sccm
PERFORMANCE CHARACTERISTICS
(V_S = 10 ±0.01 V, T_A = 25°C)
Characteristics
Zero offset
FMOM025HB
FMOL001DB
Repeatability and hysteresis
FMOM025HB
(combined)
FMOL001DB
Temperature effects⁵ Offset -25 to 85 °C
Span -25 to 25 °C
25 to 85 °C
Response time
Common mode pressure
Min.
-1.0
-1.5
Typ.
0
0
±0.20
2.5
-2.5
1.0
Max.
1.0
1.5
±0.35
±0.50
Unit
mV
% reading
mV
% reading
3.0
ms
150
psi
Notes:
3 _{A 5 micron filter is recommended for all devices.}
4 _{Maximum allowable rate of flow change to prevent damage.}
5 _{Shift is relative to 25 °C.}
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