B1525A Datasheet, PDF (9/36 Pages) Keysight Technologies – Semiconductor Device Analyzer

09 | Keysight | B1500A Semiconductor Device Analyzer - Data Sheet
HPSMU Module Specifications
Voltage range, resolution, and accuracy (high resolution ADC)
Voltage
range
±2 V
±20 V
±40 V
±100 V
±200 V
Force
resolution
100 µV
1 mV
2 mV
5 mV
10 mV
Measure
resolution
2 µV
20 µV
40 µV
100 µV
200 µV
Force accuracy¹
±(0.018 % + 400 µV)
±(0.018 % + 3 mV)
±(0.018 % + 6 mV)
±(0.018 % + 15 mV)
±(0.018 % + 30 mV)
Measure accuracy¹
±(0.01 % + 140 µV)
±(0.009 % + 900 µV)
±(0.01 % + 1 mV)
±(0.012 % + 2.5 mV)
±(0.014 % + 2.8 mV)
1.  ± (% of read value + offset voltage V)
Maximum current
1A
1A
500 mA
125 mA
50 mA
Current range, resolution, and accuracy (high resolution ADC)
Current
Force
Measure
range
resolution resolution¹ Force accuracy²
Measure accuracy²
±1 nA
50 fA
10 fA
±(0.1 %+300 fA+1 fA x Vo)
±(0.1 %+200 fA+1 fA x Vo)
±10 nA
500 fA 10 fA
±(0.1 %+3 pA+10 fA x Vo)
±(0.1 %+1 pA+10 fA x Vo)
±100 nA 5 pA
100 fA
±(0.05 %+30 pA+100 fA x Vo)
±(0.05 %+20 pA+100 fA x Vo)
±1 µA
50 pA
1 pA
±(0.05 %+300 pA+1 pA x Vo)
±(0.05 %+100 pA+1 pA x Vo)
±10 µA
500 pA 10 pA
±(0.05 %+3 nA+10 pA x Vo)
±(0.04 %+2 nA+10 pA x Vo)
±100 µA
5 nA
100 pA
±(0.035 %+15 nA+100 pA x Vo)
±(0.03 %+3 nA+100 pA x Vo)
±1 mA
50 nA
1 nA
±(0.04 %+150 nA+1 nA x Vo)
±(0.03 %+60 nA+1 nA x Vo)
±10 mA
500 nA 10 nA
±(0.04 %+1.5 µA+10 nA x Vo)
±(0.03 %+200 nA+10 nA x Vo)
±100 mA 5 µA
100 nA
±(0.045 %+15 µA+100 nA x Vo)
±(0.04 %+6 µA+100 nA x Vo)
±1 A
50 µA
1 µA
±(0.4 %+300 µA+1 µA x Vo)
±(0.4 %+150 µA+1 µA x Vo)
Maximum voltage
200 V
200 V
200 V
200 V
200 V
200 V
200 V
200 V
³
³
1.  Specified measurement resolution is limited by fundamental noise limits.
2.  ± (% of read value + offset current (fixed part determined by the output/measurement range + proportional part that is multiplied by Vo))
3.  200 V (Io ≤ 50 mA), 100 V (50 mA < Io ≤ 125 mA), 40 V (125 mA < Io ≤ 500 mA), 20 V (500 mA < Io ≤ 1 A), Io is the output current in Amps.
Voltage range, resolution, and accuracy (high speed ADC)
Voltage
range
Force
Measure
resolution resolution
Force accuracy¹
Measure accuracy¹
±2 V
100 µV 100 µV
±(0.018 % + 400 µV)
±(0.01 % + 700 µV)
±20 V
1 mV
1 mV
±(0.018 % + 3 mV)
±(0.01 % + 4 mV)
±40 V
2 mV
2 mV
±(0.018 % + 6 mV)
±(0.015 % + 8 mV)
±100 V
5 mV
5 mV
±(0.018 % + 15 mV)
±(0.02 % + 20 mV)
±200 V
10 mV
10 mV
±(0.018 % + 30 mV)
±(0.035 % + 40 mV)
1.  ± (% of read value + offset voltage V)
Maximum current
1A
1A
500 mA
125 mA
50 mA