B1525A Datasheet, PDF (15/36 Pages) Keysight Technologies – Semiconductor Device Analyzer

15 | Keysight | B1500A Semiconductor Device Analyzer - Data Sheet
Measurement accuracy
The following parameters are used to express the impedance
measurement accuracy at the measurement port of the MFCMU
or the MFCMU cable (1.5 m or 3.0 m).
Z_X: Impedance measurement value (Ω)
D_X: Measurement value of D
E = E_P’ + (Z_S’/|Z_X| + Y_O’|Z_X|) x 100 (%)
E_P’ = E_PL + E_POSC + E_P (%)
Y_O’ = Y_OL + Y_OSC + Y_O (S)
Z_S’ = Z_SL + Z_OSC + Z_S (Ω)
|Z| accuracy
±E (%)
q accuracy
±E/100 (rad)
C accuracy
at D_X ≤ 0.1
±E (%)
at D_X > 0.1
±E x √¯ ¯(¯1¯ ¯+¯ ¯ ¯D¯ ¯_X¯2¯ _{) (%)}
D accuracy
at D_X ≤ 0.1
±E/100
at D_X > 0.1
±E x (1 + D_X)/100
G accuracy
at D_X ≤ 0.1
±E/ D_X (%)
at D_X > 0.1
±E x √¯(¯¯1¯¯¯¯+ D_X2) /D_X (%)
Note: measurement accuracy is specified under the following
conditions:
Temperature: 23 °C ±5 °C
Integration time: 1 PLC or 16 PLC