MPXHZ6116A Datasheet, PDF (2/10 Pages) Freescale Semiconductor, Inc – Media Resistant Integrated Silicon Pressure Sensor for Measuring Absolute Pressure, On-Chip Signal Conditioned, Temperature Compensated and Calibrated

Pressure
Operating Characteristics
Table 1. Operating Characteristics (V_S = 5.0 Vdc, T_A = 25°C unless otherwise noted, Decoupling circuit shown in Figure 3
required to meet electrical specifications.)
Characteristic
Symbol
Min
Typ
Max
Unit
Pressure Range
Supply Voltage⁽¹⁾
P_OP
20
—
115
kPa
V_S
4.75
5.0
5.25
Vdc
Supply Current
Full Scale Span⁽²⁾
(0 to 85°C)
I_S
V_FSS
—
6.0
10
mAdc
—
4.2
—
Vdc
Offset⁽³⁾
Sensitivity
Accuracy⁽⁴⁾
(0 to 85°C)
V_off
V/P
(0 to 85°C)
—
0.335
—
-1.5
0.399
44.2
—
0.463
—
+1.5
Vdc
mV/kPa
%V_FSS
Pressure Range
P_OP
20
—
115
kPa
1. Device is ratiometric within this specified excitation range.
2. Full Scale Span (V_FSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
3. Offset (V_off) is defined as the output voltage at the minimum rated pressure.
4. Accuracy (error budget) is the deviation in actual output from nominal output over the entire pressure range and temperature range as a
percent of V_SS span at 25°C due to all sources of error including the following:
Linearity:
Output deviation from a straight line relationship with pressure over the specified pressure range.
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to
and from the minimum or maximum operating temperature points, with zero differential pressure applied.
Pressure Hysteresis:
Offset Stability:
TcSpan:
TcOffset:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum
or maximum rated pressure at 25°C.
Output deviation, after 1000 temperature cycles, -40° to 125°C, and 1.5 million pressure cycles, with minimum
rated pressure applied.
Output deviation over the temperature range of 0° to 85°C, relative to 25°C.
Output deviation with minimum pressure applied, over the temperature range of 0° to 85°C, relative to 25°C.
MPXHZ6116A
2
Sensors
Freescale Semiconductor