MLX90609 Datasheet, PDF (8/22 Pages) List of Unclassifed Manufacturers – Angular Rate Sensor (Standard version)

MLX90609
Angular Rate Sensor (Standard version)
5. Detailed Description
5.1 The Working Principle
The MLX90609 is a Z-axis rate-sensing device, also called yaw-rate sensing. It produces an analog
positive going output voltage for clockwise (CW) rotation around the axis normal to the package
top, i.e., clockwise when looking down at the package lid as well as a digital SPI signal proportional
to the angular rate.
Figure 5-1. Angular rate (positive for clockwise rotation) to voltage output
The sensor is a MEMS gyroscope sensitive to Coriolis forces. To create a Coriolis force a
movement must be induced. The gyro has an actuated oscillating mechanical structure (primary
mode). The Coriolis force creates a second oscillating movement when the gyroscope rotates
(secondary mode). As Coriolis force is usually extremely weak the primary mode is driven into
resonance to keep the mechanical noise level low for the signal bandwidth used and to have a
good sensitivity. A capacitance change in the secondary mode is detected and transformed into an
output voltage by the electronic interface circuitry.
The electronic interface must convert a change in the sensor capacitance ∆C into a change in
transducer output voltage VOUT according to the following transfer equation:
V_OUT = Bias + Gain ∗ AngularRat e
The bias and gain are adjustable over temperature in order to compensate for the TC of sensor and
readout. After adjusting the bias and gain values and after setting operating mode switches during
the calibration process the transducer output voltage versus angular rate must stay as shown in
Figure 5-1 over the specified temperature range.
390109060901
Rev 007
Page 8 of 22
Data Sheet
January/08