TALP1000B Datasheet, PDF (3/6 Pages) Texas Instruments – Dual-Axis Analog MEMS Pointing Mirror

Not Recommended For New Designs
TALP1000B
www.ti.com ..................................................................................................................................... SLBS006A – NOVEMBER 2004 – REVISED SEPTEMBER 2009
ELECTRO/MECHANICAL CHARACTERISTICS
over operating supply voltage and operating temperature ranges (unless otherwise noted)
PARAMETER
TEST CONDITIONS
MIN
V_CC Supply voltage
Typical power supply rejection of position sensor
detectors is >50 dB, 20 kHz to 50 kHz.
4.8
Power dissipation
At maximum angle for both axes, includes position
feedback and coil drive. 0.65 to 10 micron wavelength
range
Mechanical rotation
Applies to both axes, each axis independent, angle
relative to plane determined by mirror-side mounting
0
positions, over the entire temperature range.
Mirror resonance
frequency
Measured at 25°C and 0 degree rotation
112
Gimbals resonance
frequency
Measured at 25°C and 0 degree rotation
100
Resonance frequency
variation over operating
temperature range
Resonance frequency
variation over rotation
range–each axis
Mirror mechanical Q
Measured by fitting exponential decay after removing
2-mA current pulse. Quiescent angle, 25°C
100
Coil current at maximum Over the entire temperature range
rotation
20
Mirror drift at constant coil Mirror position is stable to within 5% of full angular
current
range (0.5°) over time and operating temperature
range.
Coil drive linearity
Difference between a mirror angle at a given current,
and the angle predicted by a linear fit to angle versus
current over the range of ±5 degrees at 25°C
Coil resistance: each axis Measured at 25°C, coils use copper wire with
variation over temperature given by R = R₀[1 + a(T –
61
T₀)], where, a = 3.9 × 10–3/°C
Quiescent angle: mirror
side
Angle relative to plane determined by mirror-side
mounting positions, over the entire temperature range
Quiescent angle: coil side Angle relative to plane determined by coil-side
mounting positions, over the entire temperature range
Mirror crosstalk
Off-axis rotation induced by on-axis actuation relative
to axes determined by mirror mounting positions
Mirror curvature radius
Over the entire temperature range
5
Mirror reflectivity
Over the entire temperature range
95%
Displacement of optical
surface from axis of
rotation
Mirror surface roughness
Measured over a 0.5 mm square window.
rms =
½
y₁² + y₂² + . . . + y_N²
N
Particulates
Where y_x are the height elements along the profile
and N is the number of discrete elements.
3 dig surface quality. The diameter of the maximum
sized particle on the mirror must not exceed 30 μmm
(corresponding to 3 dig surface quality). The sum of
the diameters of all particles on the mirror must not
exceed twice this size. Two particles must not be
closer than 200 μm. Particles less than 5 μm are
ignored. ⁽¹⁾
TYP
MAX UNIT
5.2
V
700
mW
±5 deg
152
Hz
140
Hz
10
Hz
8
Hz
65 mA
5%
0.4 deg
71
Ω
±0.3 deg
±0.5 deg
5%
m
65 μm
200 nm
(1) The diameter of an irregularly shaped particle is the average of its length and width.
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