D6F-P_10 Datasheet, PDF (2/6 Pages) Omron Electronics LLC – MEMS Mass Flow Sensor

■ Absolute Maximum Rating
Item
Power supply voltage
Output voltage
Symbol
Vcc
Vout
■ Output Voltage Characteristics
D6F-P0001A@
3.0
2.5
2.0
1.5
1.0
0.5
0.0
0
0.02 0.04
0.06 0.08 0.10
Flow Rate (L/min)
D6F-P0001A@
Flow Rate (LPM)
Output Voltage (VDC)
0.00
0.50 ± 0.10
0.02
0.90 ± 0.10
Rating
10
4.0
Unit
VDC
VDC
D6F-P0010A@
3.0
2.5
2.0
1.5
1.0
0.5
0.0
0
0.25
0.5
0.75
1
Flow Rate (L/min)
0.04
1.30 ± 0.10
0.06
1.70 ± 0.10
0.08
2.10 ± 0.10
0.10
2.50 ± 0.10
D6F-P0010A@
Flow Rate (LPM)
Output Voltage (VDC)
0.00
0.50 ± 0.10
0.25
1.60 ± 0.10
0.50
2.10 ± 0.10
0.75
2.31 ± 0.10
1.00
2.50 ± 0.10
Note: 1. Mass flow converted into volumetric flow rate, SLM (standard liters per minute) at 0°C, 1 atmosphere.
2. 0 to 0.5 VDC output indicates a negative flow direction.
3. Measurement condition: Power supply voltage 5 ± 0.1VDC, ambient temperature 25 ± 5 °C and ambient humidity 25 to 75% RH.
■ Repeatability. (Typical test results)
(5 Samples, D6F-P0010A@, repeated 10 times each)
1.0
0.8
0.6
0.4
0.2
0.0
-0.2
-0.4
-0.6
-0.8
-1.0
0.0
0.3
0.5
0.8
1.0
Flow Rate(lpm)
8
MEMS Mass Flow Sensor D6F-P