D6F-P_10 Datasheet, PDF (1/6 Pages) Omron Electronics LLC – MEMS Mass Flow Sensor

MEMS Mass Flow Sensor
D6F-P
A Compact, High-performance Flow
Sensor with Dust Segregation Structure.
• Built in Dust Segregation System (DSS) with cyclone flow
structure, diverts particulates from sensor element.
• High resolution and repeatability, even at low flow rates.
• Barbed ports with connector or PCB terminals, or manifold
mount with connector versions.
• Built in voltage regulator, temperature compensation and
amplified output. Measure up to 200 LPM with a bypass setup.
• Alternative to differential pressure sensing.
• RoHS Compliant
Ordering Information
Description
Flow Sensor
Cable Connector Assembly
Case
PBT
---
Calibration Gas
(See note 1.)
Air (See note 2.)
---
Flow Range
0-0.1 LPM
0-1 LPM
---
Mounting
Method
Flange mount
Manifold mount
---
Connection
PCB terminals
Connector
Connector
---
Model
D6F-P0001A1
D6F-P0010A1
D6F-P0010A2
D6F-P0010AM2
D6F-CABLE2
Note: 1. Can be calibrated for different gas types. Consult your Omron representative.
2. Dry gas must not contain large particles, eg dust, oil, mist.
3. Cable Assembly “D6F-CABLE2”, used with D6F-P0010A2 and D6F-P0010AM2, is sold separately.
Specifications
■ Characteristics
Models
Flow Range (See note 1.)
Calibration Gas (See note 2.)
Flow Port Type
Electrical Connection
Power Supply
Current Consumption
Operating Output Voltage
Output Voltage Limits (Min and Max.)
Accuracy and Temperature Characteristics
Repeatability (Reference (typical))
Case Material
Degree of Protection
Withstand Pressure
Pressure Drop (Reference (typical))
Operating Temperature
Operating Humidity
Insulation Resistance
Dielectric Strength
Weight
Response Time (Reference (typical))
D6F-P0001A1
D6F-P0010A1
D6F-P0010A2
D6F-P0010AM2
0 to 0.1 L/min.
0 to 1 L/min.
Air
barbed fitting maximum outside dia. 4.9 mm
manifold mount
Lead terminal
Connector (3 wire)
4.75 to 9.45 VDC
Max. 15 mA (no load, Vcc = 5 VDC)
0.5 to 2.5 VDC
0 VDC min. and 3.1 VDC max. (Lead resistance 10 kΩ)
± 5% F.S. max. of detected characteristics at 25 °C, within -10 to 60 °C (typical test results within ±2% F.S.)
± 1.0% F.S.
± 0.4% F.S.
PBT
IP40
50 kPa (7 psi)
0.19 kPa
0.48 kPa
-10 to 60°C (1 LPM versions) and -33 to 75°C (0.1 LPM version) with no icing or condensation
(Storage: -40 to 80°C with no icing or condensation)
35 to 85% RH with no icing or condensation (Storage: 35 to 85% RH with no icing or condensation)
20 MΩ (500 VDC between lead terminal and the case)
500 VAC, 50/60 Hz for 1 minute. (Leakage current typ. Max. 1mA) between lead terminals and case.
8.5 g
8.0 g
150 msec
Note: 1. Mass flow converted into volumetric flow rate, SLM (standard liters per minute) at 0°C, 1 atmosphere.
2. Dry gas. (must not contain large particles, dust, oil, mist)
MEMS Mass Flow Sensor D6F-P
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