AN884 Datasheet, PDF (6/6 Pages) Maxim Integrated Products – Miniature Flow Sensor Has Electronic Temperature Compensation

Figure 5. Built with multi-chip-module (MCM) technology, the pressure-sensor module
measures 12x19mm.
Figure 6. In this micro-fluidic dosing and analysis system, the flow-sensor output
provides feedback for continuous flow-rate control.
Authors:
Bernhard Konrad, Maxim Integrated Products, Germany
Philipp Arquint, Institute of Microtechnology, University of Neuchâtel
Bart van der Schoot, Seyonic SA, Neuchâtel
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