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AN884 Datasheet, PDF (5/6 Pages) Maxim Integrated Products – Miniature Flow Sensor Has Electronic Temperature Compensation
Figure 4. The pressure-sensor module consists of a dual flow sensor and two signal-
conditioner ICs.
A photo of the 12x19mm pressure-sensing module (Figure 5) illustrates the MCM technology:
a monolithic flow sensor module, wire-bonded to the ceramic carrier, connects to the two
sensor-signal processors (MAX1458s), which are also wire-bonded and mounted as dice.
Figure 6 illustrates a micro-fluidic dosing and analysis system, in which the flow-sensor output
described above serves as a feedback signal in achieving continuous and dynamic flow-rate
control.
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