S10043 Datasheet, PDF (2/2 Pages) Hamamatsu Corporation – Highly reliable photodiode for VUV detection

s Spectral response
0.25
(Typ. Ta=25 ˚C)
0.20
0.15
0.10
0.05
0
100 200 300 400 500 600 700 800 900 1000
WAVELENGTH (nm)
KSPDB0257EA
s Dimensional outline (unit: mm)
16.5 ± 0.2
Y
X
ACTIVE AREA
10 × 10
PHOTOSENSITIVE
SURFACE
Si photodiode S10043
s Sensitivity change after exposure to ArF laser
105
(Typ. λ=193 nm)
100
S8552
95 (CONVENTIONAL
TYPE)
90
S10043
85
80
75
70
65
60
0
0.2
0.4
0.6
0.8
1
EXPOSURE (kJ/cm²)
KSPDB0258EA
BLACK CERAMIC
(2 ×) 0.5
Fe·Ni·Co ALLOY
ANODE
TERMINAL MARK
15.1 ± 0.3
12.5 ± 0.2
TAPE
Chip position accuracy
with respect to the package center
-0.3≤X, Y≤+0.3
KSPDA0171EA
s Handling precautions
q Handle the photodiodes in a clean room.
q Never touch the photodiode chip surface and wire bonding.
q Wear dust-proof gloves and dust-proof mask.
q Use an air dust cleaner to blow away dust and foreign matter on the photodiode chip surface.
q Do not clean the photodiodes by any method other than air blow.
Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions.
Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2006 Hamamatsu Photonics K.K.
HAMAMATSU PHOTONICS K.K., Solid State Division
1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: [phone], Fax: [phone], www.hamamatsu.com
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P.O.Box 6910, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: [phone], Fax: [phone]
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: [phone], Fax: [phone]
France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: [phone], Fax: [phone]
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: [phone], Fax: [phone]
North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171 41 Solna, Sweden, Telephone: [phone], Fax: [phone]
Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: [phone], Fax: [phone]
Cat. No. KSPD1072E01
2
Jun. 2006 DN