S10043 Datasheet, PDF (1/2 Pages) Hamamatsu Corporation – Highly reliable photodiode for VUV detection

PHOTODIODE
Si photodiode
S10043
Highly reliable photodiode for VUV detection
S10043 is a Si photodiode designed to detect high-power ArF excimer lasers (193 nm) with high accuracy and stability. By combining our
newly developed technologies for forming ultra-thin PN junctions and high-reliability ultra-thin metal films, S10043 shows almost no change
in sensitivity even after exposure to ArF excimer laser beam of 1 kJ/cm².
Features
l Greatly improved sensitivity stability even after exposure
to ArF (λ=193 nm) excimer laser
l Windowless package *¹
Applications
l ArF excimer laser detection
l Various UV detection
s Absolute maximum ratings (Ta=25 °C)
Parameter
Symbol
Value
Unit
Reverse voltage
VR Max.
5
V
Operating temperature *²
Topr
-20 to +60
°C
Storage temperature *²
Tstg
-55 to +80
°C
s Electrical and optical characteristics (Ta=25 °C)
Parameter
Symbol
Condition
Min.
Typ.
Max.
Unit
Spectral response range
λ
-
190 to 1000
-
nm
Peak sensitivity wavelength
λp
-
720
-
nm
Photo sensitivity
S λ=193 nm
10
15
-
mA/W
Dark current
ID VR=10 mV
-
0.1
1
nA
Terminal capacitance
Ct VR=0 V, f=10 kHz
-
4
-
nF
Rise time
tr
VR=0 V, RL=1 kΩ
10 to 90 %
-
9
-
µs
*1: S10043 uses a windowless package with no protection on the photodiode chip, and is shipped with the package held with
glass tape. Remove the glass tape when using.
*2: No condensation
1