S9682_11 Datasheet, PDF (1/3 Pages) Hamamatsu Corporation – Si photodiode Highly reliable photodiode for VUV detection

PHOTODIODE
Si photodiode
S9682, S9683
Highly reliable photodiode for VUV detection
S9682 and S9683 are Si photodiodes specifically designed to detect VUV (vacuum ultraviolet) radiation with high reliability. These photodiodes
are hermetically sealed in a metal package with a quartz window. There is no outgassing from the inside of the package, eliminating the cause of
decrease in VUV sensitivity.
Features
l Highly stable sensitivity and dark current against
ArF excimer laser radiation (λ=193 nm)
l Hermetically sealed metal package with quartz window
l Large active area:
S9682: 5.8 × 5.8 mm (TO-8 metal package)
S9683: 10 × 10 mm (1 inch metal package)
Applications
l ArF excimer laser detection
l UV detection
s Absolute maximum ratings (Ta=25 °C)
Parameter
Symbol
Reverse voltage
VR Max.
Operating temperature
Topr
Storage temperature
Tstg
s Electrical and optical characteristics (Ta=25 °C)
Parameter
Symbol
Condition
Min.
Spectral response range
λ
-
Peak sensitivity wavelength λp
-
Photo sensitivity
S λ=193 nm
45
Dark current
ID VR=10 mV
-
Terminal capacitance
Ct VR=0 V, f=10 kHz -
Rise time
tr
VR=0 V, RL=1 kΩ
10 to 90 %
-
Value
5
-40 to +100
-55 to +125
S9682
Typ.
193 to
1000
760
60
0.02
1.0
2
Max.
-
-
-
0.5
-
-
Unit
V
°C
°C
S9683
Unit
Min.
Typ.
Max.
-
193 to
1000
-
nm
-
760
-
nm
45
60
-
mA/W
-
0.05
1.0
nA
-
4.0
-
nF
-
9
-
µs
1