S9037 Datasheet, PDF (1/9 Pages) Hamamatsu Corporation – CCD image sensor High-speed operation, back-thinned FFT-CCD

IMAGE SENSOR
CCD image sensor
S9037/S9038 series
High-speed operation, back-thinned FFT-CCD
S9037/S9038 series FFT-CCD image sensors were developed for high-speed line scan cameras. Since an on-chip amplifier having a wide
bandwidth is used to an image sensor, a pixel rate of 10 MHz can be obtained. S9037/S9038 series image sensors also deliver a high line scan
rate equivalent to interline CCD sensors when used in line binning operation mode, because they have an active area pixel format where the
number of vertical pixels is less than the number of horizontal pixels. This makes S9037/S9038 series ideal for line scan cameras.
S9037/S9038 series image sensors have a pixel size of 24 × 24 µm and are available in pixel formats of 512 × 4 pixels and 1024 × 4 pixels.
S9038 series has a one-stage thermoelectric cooler assembled in the same package allowing stable operation at cooled temperatures. Both
S9037/S9038 series image sensors use a quartz glass window equivalent to SUPRASIL glass that provides high transmittance even at 193 nm
wavelength. These image sensors also have stable quantum efficiency in the UV region making them ideal for excimer laser monitors.
Features
l High-speed operation: 10 MHz
l Pixel size: 24 × 24 µm
l Line/pixel binning operation
l S9038 series: one-stage thermoelectric cooling
l High quantum efficiency: 90 % or more at peak
l MPP operation
Applications
l Excimer laser monitors
l High-speed line scan cameras
s Selection guide
Type No.
S9037-0902
S9037-1002
S9038-0902S
S9038-1002S
Cooling
Non-cooled
One-stage TE-cooled
Number of total pixels
520 × 6
1044 × 8
520 × 6
1044 × 8
Number of active pixels
512 × 4
1024 × 4
512 × 4
1024 × 4
Active area
[mm (H) × mm (V)]
12.288 × 0.096
24.576 × 0.096
12.288 × 0.096
24.576 × 0.096
s Specifications
Parameter
S9037-0902
S9037-1002
S9038-0902S
S9038-1002S
Line rate
16 kHz
8 kHz
16 kHz
8 kHz
Data rate
10 MHz
Vertical clock
2 phases
Horizontal clock
2 phases
Output circuit
Two-stage MOSFET source follower
Package
24 pin metal package
Window material *¹
Quartz window equivalent to SUPRASIL
AR-coated sapphire
*1: Window-less type is available as option.
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