S9037-0902_15 Datasheet, PDF (1/12 Pages) Hamamatsu Corporation – CCD image sensor

CCD image sensor
S9037/S9038 series
High-speed operation, back-thinned FFT-CCD
The S9037/S9038 series FFT-CCD image sensors were developed for high-speed line scan cameras. Since an on-chip ampli-
fier having a wide bandwidth is used to an image sensor, a pixel rate of 10 MHz can be obtained. The S9037/S9038 series
image sensors also deliver a high line scan rate equivalent to interline CCD sensors when used in line binning operation
mode, because they have an active area pixel format where the number of vertical pixels is less than the number of horizon-
tal pixels. This makes the S9037/S9038 series suitable for line scan cameras.
The S9037/S9038 series image sensors have a pixel size of 24 × 24 μm and are available in pixel formats of 512 × 4 pixels
and 1024 × 4 pixels.
The S9038 series has a one-stage thermoelectric cooler assembled in the same package allowing stable operation at cooled
temperatures. Both the S9037/S9038 series image sensors use a quartz glass window equivalent to SUPRASIL glass that
provides high transmittance even at 193 nm wavelength. These image sensors also have stable quantum efficiency in the UV
region making them suitable for excimer laser monitors.
Features
High-speed operation: 10 MHz
Pixel size: 24 × 24 μm
Line/pixel binning operation
S9038 series: one-stage thermoelectric cooling
High quantum efficiency: 90% or more at peak
MPP operation
Applications
Excimer laser monitors
High-speed line scan cameras
Structure
Parameter
S9037-0902
S9037-1002
S9038-0902S
S9038-1002S
Pixel size (H × V)
24 × 24 μm
Number of total pixels (H × V)
520 × 6
1044 × 8
520 × 6
1044 × 8
Number of effective
pixels (H × V)
512 × 4
1024 × 4
512 × 4
1024 × 4
Image size (H × V)
12.288 × 0.096 mm 24.576 × 0.096 mm 12.288 × 0.096 mm 24.576 × 0.096 mm
Vertical clock
2 phases
Horizontal clock
2 phases
Output circuit
Two-stage MOSFET source follower
Package
24-pin ceramic DIP
Window material*¹
Quartz window equivalent to SUPRASIL*²
AR-coated sapphire*³
Cooling
Non-cooled
One-stage TE-cooled
*1: Window-less type (ex. S9037-0902N) is available as option.
(Temporary window is fixed by tape to protect the CCD and wire bonding.)
*2: Resin sealing
*3: Hermetic sealing
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