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SM5812 Datasheet, PDF (3/4 Pages) List of Unclassifed Manufacturers – Amplified Pressure Sensor
SILICON
MICROSTRUCTURES
INCORPORATED
SM5812/SM5852
CHARACTERISTICS FOR SM5812/SM5852 – SPECIFICATIONS
All parameters are measured at room temperature while applying 5.000V supply, unless otherwise specified.
Zero output (absolute and gauge)
Zero output (differential)
Output Span
0.15 PSI
Linearity
0.15 PSI
Pressure hysteresis
5812
5852
Temperature coefficient - Zero
0.15 PSI
Temperature coefficient – Span
0.15 PSI
Thermal hysteresis
Response Time
Supply voltage
Current consumption
Overpressure
5812
5852
Operating temperature range
Compensated temperature range
Storage temperature range
Media compatibility
Weight
Absolute1, Gage & Single2
MIN
TYP
MAX
0.42
0.50
0.58
3.92
4.00
4.08
3.80
4.00
4.20
-0.5
+0.5
-2.5
+2.5
-0.1
+0.1
-0.3
+0.3
-1.0
+1.0
-2.5
+2.5
-1.0
+1.0
-2.0
+2.0
-0.1
+0.1
2
4.75
5.00
5.25
10
3X
15X
-40
25
+125
0
25
+70
-55
25
+135
3
Differential
MIN
TYP
MAX
2.42
2.50
2.58
1.96
2.00
2.04
1.90
2.00
2.10
-0.5
+0.5
-2.5
+2.5
-0.1
+0.1
-0.3
+0.3
-1.0
+1.0
-2.5
+2.5
-1.0
+1.0
-2.0
+2.0
-0.1
+0.1
2
4.75
5.00
5.25
10
3X
15X
-40
25
+125
0
25
+70
-55
25
+135
3
UNITS
V
V
V FS
V FS
%FS
%FS
%FS
%FS
%FS
%FS
%FS
%FS
%FS
msec
V
mA
%FS
%FS
°C
°C
°C
gram
NOTES
3
3
3, 4
3, 4
5
5
3, 7
6
6
8
Notes:
1. Absolute parts are only offered in the SM5812 Series.
2. Single-ended parts (Pressure Type - S) have 2 ports and are for higher gain differential applications where the
differential pressure is always positive.
3. Sensor output is ratiometric to supply.
4. Full-scale (FS) is defined as zero pressure to rated pressure; differential parts can be used ±FS. Absolute and Gauge
zero output is 0.5 V typical and full-scale output is 4.5 V. Span is the difference between Full-scale output and zero
output, (4 V). For Differential parts, the negative full-scale is typically at 0.5 V, zero is typically 2.5 V, and positive full-
scale is 4.5 volts to give a span of ±2.0 V.
5. Defined as best fit straight line for positive pressure applied to the part
6. Or 225 PSI, whichever is less. Output amplifier will saturate at about 0.25 V for applied pressure below the rated Zero
and at about 4.75 V for applied pressure above the rated Full-scale.
7. A 100 nF filter capacitor must be placed between Vsupply and Ground.
8. Clean, dry gas compatible with wetted materials. Wetted materials include Pyrex glass, silicon, alumina ceramic, epoxy,
RTV, gold, aluminum, and nickel.
Rev 1.4 6_05
 2005 SMI
Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 ♦ USA
Tel: 408-577-0100 ♦ Fax: 408-577-0123 ♦ Sales@si-micro.com ♦ www.si-micro.com