SM5103 Datasheet, PDF (2/2 Pages) List of Unclassifed Manufacturers – HIGH SENSITIVITY, LOW-PRESSURE SILICON DIE

SM5103
CHARACTERISTICS FOR SM5103 - SPECIFICATIONS
All parameters are measured at 5.000V supply at room temperature, unless otherwise specified.
Min.
Typ.
Max.
Units
Notes
Excitation Voltage
0
5.0
10.0
V
1
Excitation Current
0
1.5
3.0
mA
1
Span (FS Range)
2
0.3 PSI 25
50
75
mV
0.8 PSI 25
50
75
mV
1.5 PSI 25
50
75
mV
3.0 PSI 25
50
75
mV
Offset
-75
0
25
mV
TC Span
-24
-19
-15.5
%FS/100°C
3
TC Offset
-7
-1
+7
%FS/100°C
3
TC Resistance
24
27.5
33
%/100°C
Linearity
-0.3
+0.1
0.3
%FS
4
Bridge Impedance
2.7
3.3
4.0
kΩ
Proof Pressure
10X
Rated FS
Burst Pressure
15X
Rated FS
5
Operating Temperature
-40
125
°C
Storage Temperature
-55
150
°C
Notes:
1. Bridge may be driven with positive or negative excitation as long as Vsub is not connected. SMI does recommend connecting
the Vsub to the highest voltage in the bridge for added offset stability.
2. Measured at 5V constant voltage excitation.
3. Measured from 0 to 70 C
4. Defined as best straight line; 0.3 PSI linearity is ⁺ 0.5% FS (max).
5. Burst Pressure is the pressure where the part can survive the overpressure but may degrade over repeated cycles.
0.5
1.0
mm
+Vexc1 ^mm
1.0
0.5
Vsub ^mm Sig-
mm
3.15
3.4
mm
mm
Positive output for pressure
applied to the top (circuit) side of
Die dimensions in mm
the sensor
ORDERING INFORMATION:
Pressure Ranges
PSI 5103
Model Number
0.3 003
Sig+
Sig-
SM5103 - 003 - G
Pressure Pressure
range
Type
0.8 008
1.5 015
3.0 030
Gage only.
Custom ranges available
in high volumes
+Vexc
0.5 mm
0.375 mm 0.375 mm
-Vexc
-Vexc1
+Vexc1
SM5103 Die (3.4X3.2 mm as sawn)
Covered under USA Mask-Copyright
See separate Application Notes for typical range of variation in Saw
dimensions.
Notice:
Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the use of any
circuits described herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement. While the information in this
publication has been checked, no responsibility, however, is assumed for inaccuracies.
Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to
cause failure of a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications.
Rev 1.2 8_02
 2001-2002
Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA
Tel: [phone] ♦ Fax: [phone] ♦ [e-mail] ♦ WWW.Si-Micro.Com