SM5103 Datasheet, PDF (1/2 Pages) List of Unclassifed Manufacturers – HIGH SENSITIVITY, LOW-PRESSURE SILICON DIE

SILICON
MICROSTRUCTURES
INCORPORATED
• HIGH SENSITIVITY, LOW-PRESSURE SILICON DIE
SM5103
Low-Pressure Die
DESCRIPTION
The SM5103 is a silicon micro-machined,
piezoresistive low pressure sensing chip.
These devices are available in full-scale
ranges from 0.3 to 3.0 psi and are ideal for
OEM and high volume applications.
Provided in die form, these sensors can be
mounted on ceramic or PC board substrates
as part of an OEM system. They also may
be packaged into proprietary or application-
specified sensor lines.
Die are probed, inked and diced, and
shipped on tape.
Custom pressure ranges available in high-
volume applications.
FEATURES
• Low Pressure (from 0-0.3 to 0-3.0 PSI)
• High Performance at Low Pressures
• Constant Current or Constant Voltage
Drive
• High Volume, Low Cost
• High Millivolt Output
APPLICATIONS
• Air Flow
• Level Detection
• HVAC
• Instrumentation
• Gas Analysis
Rev 1.2 8_02
 2001-2002
Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA
Tel: [phone] ♦ Fax: [phone] ♦ [e-mail] ♦ WWW.Si-Micro.Com