SLQ-QT500 Datasheet, PDF (1/7 Pages) List of Unclassifed Manufacturers – High Purity Flow Meter

SLQ-QT500 Liquid Flow Meter
High Purity Flow Meter
 Liquid flow rates up to 120 ml/min
 Dual calibration for IPA and H2O
 Response time < 50 ms
 Straight flow channel, no moving parts
 For a wide range of viscosities
 Inert wetted materials (PFA, Quartz)
Product Summary
The SLQ-QT500 Liquid Flow Meter enables fast, non-
invasive measurements of liquids for demanding high
purity applications. Dual calibration (water, H2O; and
isopropyl alcohol, IPA) allows flow monitoring for water-
based or hydrocarbon-based liquids. The straight-
through wetted flow path has no moving parts and
consists entirely of only PFA and Quartz. Its excellent
chemical compatibility makes the SLQ-QT500 the first
choice for measuring even aggressive chemicals or
high-viscosity liquids.
Interface Options
Digital
- I2C-Bus
- RS485-Bus
- USB cable
Analog
- Voltage output (0-10 V)
- Additional operation
modes
For more information on communication, please refer
to page 3 of this document.
1 Sensing Performance
Table 1: Performance of the SLQ-QT500 (all data for medium IPA, 23°C, unless otherwise noted)
Parameter
SLQ-QT500 (IPA) SLQ-QT500 (H2O)
Full scale flow rate
2000 (120)
2000 (120)
Flow meter output limit^a
2500 (150)
2500 (150)
Accuracy below full scale^b
(whichever error is larger)
5
0.125
5^c
0.125
Repeatability below full scale
(whichever error is larger)
0.5
0.0125
0.5
0.0125
Temperature coefficient
(additional error per °C; whichever is larger)
0.15
0.00375
0.15
0.00375
Flow detection response time 63
Response time on power-up
<50
<50
25
25
Operating temperature
+5…+50
+5…+50
Ambient storage temperature^d
-10…+60
-10…+60
Operating pressure^e
12 (175)
12 (175)
Proof pressure^e
50 (725)
50 (725)
Unit
µl/s (ml/min)
µl/s (ml/min)
% of measured value
% of full scale
% of measured value
% of full scale
% measured value / °C
% full scale / °C
ms
ms
°C
°C
bar (psi)
bar (psi)
a _{Flow rate at which the flow meter output saturates;} b _{Accuracy with straight inlet tube;} c _{Accuracy below ±1000 µl/s. See the charts in}
section 2 for the accuracy specification between 1000 µl/s and 2500 µl/s; ^d Non-condensing, flow path empty; ^e pressure limited by PFA tubing.
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Version 3 – October 2014
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