MS54XX Datasheet, PDF (1/10 Pages) Intersema Sensoric SA – MINIATURE SMD PRESSURE SENSOR

MS54XX
Miniature SMD Pressure Sensor
SPECIFICATIONS
 1, 7, 12, and 70 bar absolute pressure range
 Uncompensated
 Piezoresistive silicon micromachined sensor
 Miniature surface mount
 Ceramic carrier
 Low noise, high sensitivity, high linearity
The MS54XX SMD pressure sensor series is designed for
pressure sensor systems with highest demands on resolution and
accuracy. The device consists of a silicon micromachined
pressure sensor die mounted on a
6.2 x 6.4 mm ceramic carrier. The MS54XX can be delivered in a
high sensitivity version giving a maximal output voltage or in a
high linearity version. Both versions provide an output voltage
directly proportional to the applied pressure
Carrier
Ceramic
Full scale
pressure
1 bar
7 bar
12 bar
70 bar
High Sensitivity Versions
Product
code
Full
scale
span
Linearity
MS5401-AM 240 mV ±0.20 % FS
MS5407-AM 392 mV ±0.20 % FS
MS5470-AM 310 mV ±0.25 % FS
High Linearity Versions
Product
code
Full
scale
span
Linearity
MS5401-BM 150 mV ±0.05 % FS
MS5412-BM 150 mV ±0.05 % FS
SENSOR SOLUTIONS ///MS54XX
09/2015
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