MS52XX Datasheet, PDF (1/11 Pages) Intersema Sensoric SA – SMD PRESSURE SENSOR

Full scale
pressure
1 bar
12 bar
MS52XX
SMD Pressure Sensor
SPECIFICATIONS
 1, and 12 bar absolute pressure range
 Uncompensated
 Piezoresistive silicon micromachined sensor
 Surface mount 7.6 x 7.6 mm
 Low-noise, high-sensitivity, high-linearity
The MS52XX SMD pressure sensor series is designed for
pressure systems with the highest demands on resolution and
accuracy. The device consists of a silicon micromachined
pressure sensor die mounted on a 7.6 x 7.6 mm ceramic carrier
protected by a metal cap. The MS52XX can be delivered in a
highly-sensitive version giving a maximal output voltage or in a
highly-linear version giving a linear output voltage directly
proportional to the applied pressure.
High Sensitivity Version
Product
code
Full
scale
span
MS5201-AN 240 mV
Linearity
±0.20 % FS
High Linearity Versions
Product
code
Full
scale
span
MS5201-BN 150 mV
MS5212-BM 150 mV
Linearity
±0.05 % FS
±0.05 % FS
SENSOR SOLUTIONS /// MS52XX
09/2015
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