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KPY62-RK Datasheet, PDF (1/3 Pages) Siemens Semiconductor Group – Silicon Piezoresistive Pressure Sensor
Silicon Piezoresistive
Pressure Sensor
KPY 62-RK
KPY 66-RK
Features
• Low pressure and temperature hysteresis
• Fast response
• High sensitivity and linearity
• Fatigue free monocrystaline silicon diaphragm
giving high load cycle stability
• High long term stability
• Built in silicon temperature sensor
• Metal housing
Similar to TO-39-3
Type and
Marking
KPY 62 RK
KPY 63 RK
KPY 64 RK
KPY 65 RK
KPY 66 RK
Symbol Pressure Range Unit
P0 … PN
0 … 600
0 … 1.6
0…4
0 … 10
0 … 25
mbar
bar
Pin Configuration
1
Temp.- Sensor
(typ. R25 = 2 kΩ)
2
Not connected
3
+ VIN; Temperature sensor
4
− VOUT
5
No pin
6
Shielding, to be connected
to + VIN
7
− VIN
8
+ VOUT
Ordering Code
Q62705-K319
Q62705-K320
Q62705-K321
Q62705-K322
Q62705-K292
Semiconductor Group
1
1998-05-11