FHAL200DU Datasheet, PDF (3/4 Pages) Sensortechnics GmbH – Mass flow sensors for gases

FHA Series
Mass flow sensors for gases
FLOW SPECIFICATIONS (V_S = 10 ±0.01 V, T_A = 25°C)
Flow
(slpm)
0
25
50
75
100
150
200
Nom.
(V_DC)
1.00
2.99
3.82
4.30
4.58
4.86
5.00
±Tol.
(V_DC)
0.05
-
0.18
-
-
-
0.36
Press. drop
(inch H₂O)
0
(mbar)
0
0.04
0.10
0.13
0.33
0.21
0.53
0.34
0.85
0.65
1.64
1.09
2.74
OUTPUT VS. FLOW CURVE
GAS CORRECTION FACTORS⁵
Gas type
Correction factor (approx.)
Helium (He)
Hydrogen (H₂)
Argon (Ar)
Nitrogen (N₂)
Oxygen (O₂)
Air
Nitric oxide (NO)
Carbon monoxide (CO)
Methane (CH₄)
Ammonia (NH₃)
Nitrous oxide (N₂O)
Nitrogen dioxide (NO₂)
Carbon dioxide (CO₂)
0.5⁶
0.7⁶
0.95
1.0
1.0
1.0
1.0
1.0
1.1
1.1
1.35
1.35
1.35
Notes:
5 _{Gas correction factors are referenced to nitrogen (N2) as calibration gas type. Approximate gas correction factors are provided}
as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates.
6 _{When sensing Hydrogen (H2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage:}
Hydrogen typ. 12 V, Helium typ. 15 V
E / 11726 / A
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