910000200001 Datasheet, PDF (2/4 Pages) Sensortechnics GmbH – Normally closed proportional solenoid valve

VSO^® Low Flow
Normally closed proportional solenoid valve
PERFORMANCE CHARACTERISTICS
Part no.
910000200...
Orifice sizes
0.003" (0.076 mm)
Leak rate¹
≤0.2 sccm of helium
(bubble tight)
Response
<15 msec cycling
FLOW CURVE²
Notes:
1 _{sccm denotes Standard Cubic Centimeters per Minute. It is a unit for the flow rate at standard conditions of temperature and}
pressure. 1000 sccm = 1 slpm.
2 _{slpm denotes Standard Liters per Minute. It is a unit for the flow rate at standard conditions of temperature and pressure.}
1 slpm = 1000 sccm.
October 2006 / 255
2/4
www.sensortechnics.com