FMAL001DU Datasheet, PDF (1/5 Pages) Sensortechnics GmbH – Mass flow sensors for gases

FMA Series
Mass flow sensors for gases
FEATURES
· Ranges 0...1000 sccm¹ and 0...6 slpm²
· Actual mass flow sensing
· 1...5 V output
· Manifold mount/O-ring sealed
· Sensortechnics PRO services
MEDIA COMPATIBILITY
To be used with dry gases only
The FMA series is NOT designed for liquid
flow and will be damaged by liquid flow through
the sensor
SPECIFICATIONS
Maximum ratings
Supply voltage³
ELECTRICAL CONNECTION
P1
P2
8 to 15 V
typ. 10 ±0.01 V
Power consumption
FMAL001DU
FMAL006DU
Output load
NPN (Sinking)
PNP (Sourcing)
Temperature limits
Operating
Storage
Mechanical shock
60 mW
75 mW
10 mA
20 mA
-25 to 85°C
-40 to 90°C
100 g (5 drops, 6 axes)
123
Pin 1: Vout
Pin 2: +Vs
Pin 3: GND
Note:
1 _{sccm denotes standard cubic centimeters per minute, 1000 sccm = 1 slpm}
2 _{slpm denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0°C, 1 bar, 50% RH.}
3 _{Output voltage is ratiometric to supply voltage}
E / 11724 / A
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