AWM92100V Datasheet, PDF (1/6 Pages) Sensortechnics GmbH – Mass flow sensor for gases

AWM90000 Series
Mass flow sensor for gases
FEATURES
· Ranges 0...±200 sccm¹
or 0...±2 "H₂O (0...±5 mbar)
· Bidirectional sensing
· Actual mass flow sensing
· Low differential pressure sensing
SERVICE
To be used with dry gases only
The AWM series is NOT designed for liquid
flow and will be damaged by liquid flow through
the sensor
SPECIFICATIONS
Maximum ratings
Supply voltage²
Power consumption
Temperature limits
Operating
Storage
Mechanical shock
ELECTRICAL CONNECTION
8 to 15 V
typ. 10 ±0.01 V
50 mW
-25 to 85°C
-40 to 90°C
100 g (5 drops, 6 axes)
Note:
1 _{sccm denotes standard cubic centimeters per minute}
2 _{Output voltage is ratiometric to supply voltage}
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December 2007 / 592
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