AFC50 Datasheet, PDF (1/2 Pages) Qualiflow Therm – MFCs & MFMs series

Mass flow controllers &
accessories
MFCs & MFMs series
Smart solutions to meet your needs
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Special MFC configuration upon request (metal design...)
AFC 50 / AFM 55
The traditional analog Qualiflow Therm AFC 50 and AFM 55 with elastomeric seals and magnetic
valve :
- Unique fast and reliable horizontal magnetic valve
- Low pressure drop option for TEOS SDC, TiCl4, etc… Using Large sensor diameter gives very low
pressure drop and defeats contamination and clogging
- Perfect flow splitting through special bypass design, giving optimal linearity and accuracy
10sccm
2 5 s-l m
AFC 50D / AFM 55D
The highest performances of digital P.C.B. combined with elastomeric seals on the Qualiflow
Therm AFC 50 D and AFM 55 D :
- Full potential of digital technology
- Low pressure drop option for TEOS SDC, TiCl4, etc..
- 100% compatible with analog AFC50
1 0 s c- c m
25slm
AFC 202 / AFM 302
For high flow from 30 slm to 250 slm, the traditional analog Qualiflow Therm AFC 202 and AFM
302 with elastomeric seals and magnetic valve :
- Unique fast and reliable horizontal magnetic valve
- Special pressure compensated stainless steel valve for ultra fast flow control
- No particle generation or entrapment
3
2
0
5
s0c-scl
m
m
AFC 202D / AFM 302D
For high flow from 30 slm up to 250 slm, the highest performances of digital P.C.B. combined with
elastomeric seals on the Qualiflow Therm AFC 202D and AFM 302D :
- Full potential of digital technology
- Special pressure compensated stainless steel valve for ultra fast flow control
23500s-sl
m
lm
AFC 260 - 261 / AFM 360 - 361
The traditional analog Qualiflow Therm AFC 260 & 261 and AFM 360 & 361 with elastomeric
seals and reliable thermal valve :
-� Compatible with other MFC
-� Economic design, simple construction
-� Possibility to regulate with external readout
1 0 s c- c m
5slm
1 0 s-l m
20slm
AFM 10 & 11
A small flow meter designed to replace rotameter whenever an electrical signal of the flow
measurement is required :
- Low cost design, simple construction
- Small footprint
- Accuracy up to ±2% F.S.
2 s l- m
60slm
100slm
2 0 0 ^-s l m
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