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E32-D24 Datasheet, PDF (18/68 Pages) Omron Electronics LLC – Fiber Sensors Best Selection Catalog | |||
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Features/Applications
Application-corresponding Models
Wafer Mapping
⢠Wafers are reliable detected with an ultrafine beam.
⢠The optical axis is adjusted before delivery to allow
easy installation.
E32-A03
â Features
Optical axis adjusted
before delivery so
that displacement is
typically within 0.1°. Direction of rotation
E32-A03-1
â Overview of Model Variations
Vertical rotation
â Engineering Data
8-inch Wafer Mapping Characteristic (Typical Examples)
180
160
Wafer piles can
also be detected
140
120
100
80
170 mm
60
40
For
2 wafers
20
For
1 wafer
Fiber
6.35 mm
2-wafer pile
0
â10 â9 â8 â7 â6 â5 â4 â3 â2 â1 0 1 2 3 4
Distance moved, X (mm)
X Fiber
Silicon wafer
(t = 0.75 mm)
Type
Features
Shape, sensing distance (mm)*
Model number
Opening angle: 1.5°
With mounting
flange
E32-A03
890
E32-A03-1
Opening angle: 3° ultraslim
With mounting
flange
E32-A04
340
E32-A04-1
*The sensing distances apply for use in combination with the E3X-DA-S Amplifier Unit (general-purpose, standard mode).
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