K7L-AT50D Datasheet, PDF (1/10 Pages) Omron Electronics LLC – Liquid Leakage Sensor Amplifier with Disconnection Detection Function

Liquid Leakage Sensor Amplifier with Disconnection Detection Function
K7L-AT50D/-AT50D-S
Detect disconnections between the Sensor
Amplifier and a Terminator connected to the
end of the Sensing Band.
• Constantly monitors for disconnections between the Sensor
Amplifier and the Sensing Band.
• Failure to detect liquid leakage due to disconnection in the
Sensing Band prevented.
• Notification of disconnection detection made using LED indica-
tor and transistor output.
• After a disconnection is detected, in order to avoid instability
due to further contact of the disconnected part, the operating
status is held.
• This model retains all the characteristics of the K7L-AT50 (de-
tection sensitivity, sensing ranges, and AC detection method).
• Meets UL/CSA standards. (See information on standards on
page 31.)
Application Examples
Liquid Leakage Detection for Measuring Baths in CMP
Devices
Detects liquid leaked to drain pans, and prevents damage to devices
and cleaning irregularities for wafers.
Detection of Liquid Leakage at Pipe Joints for Chemical
Liquid Tanks
Liquid leakage at a pipe joint can be detected by wrapping the Sens-
ing Band around the joint.
Detection of Condensation and Liquid Leakage at
Semiconductor Production Installations
Detects condensation inside cleaning devices and liquid leaked to
the surroundings.
Detection of Cleaning Fluid Level for Plating Devices
Detects the level of pure water inside plating baths. High sensitivity
allows high-accuracy control that prevents cleaning irregularities.
Liquid Leakage Sensor Amplifier with Disconnection Detection Function K7L-AT50D/-AT50D-S E-29