EE-SPY801 Datasheet, PDF (1/6 Pages) Omron Electronics LLC – Wafer-carrier Mounting Photomicrosensors

Wafer-carrier Mounting Photomicrosensors
EE-SPY801/802
Photomicrosensors for detecting
wafer-carrier mounting.
■ The mounting position is set with a pedestal.
■ The contact surface with the wafer carrier uses a special
chemical-resistant fluoro-resin.
■ The unique optical system enables stable detection of
almost all wafer-carriers.
■ Light modulation effectively reduces external light
interference.
■ Utilizes talc-free clean cables.
Refer to Precautions on page 95.
Ordering Information
List of Models
Appearance
Sensing
method
Sensing dis-
tance
Output configuration
Cable length
Infrared light
Model
EE-SPY801
Reflective type
Turns ON when wafer carrier
0 to 3 mm _{is present.}
2m
EE-SPY802
Accessories (Order Separately)
Item
Pedestal
Model
EE9-C01
EE9-C02
Note: There are no sensor functions provided.
EE-SPY801/802 Wafer-carrier Mounting Photomicrosensors
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