D6F-PH Datasheet, PDF (1/6 Pages) Omron Electronics LLC – MEMS Differential Pressure Sensor

MEMS Differential Pressure Sensor
D6F-PH
A Compact, High-accuracy Differential
Pressure Sensor with Superior
Resistance to Environments.
• High accuracy of ±3% R.D.
• Linearized and temperature compensated
• Digital output (I²C communication)
• High flow impedance to reduce the influence of bypass
configuration
• RoHS Compliant
Ordering Information
Measurement Range
0 to 250 Pa (0 to 1 in. H₂O)
-50 to +50 Pa (± 0.2 in. H₂O)
-500 to +500 Pa (± 2 in. H₂O)
Applicable Fluid
Air
Note: The Sensor can be calibrated for different gas types. Consult Omron.
Characteristics
Model
D6F-PH0025AD1
D6F-PH0505AD3
D6F-PH5050AD3
Model
D6F-PH0025AD1
D6F-PH0505AD3
D6F-PH5050AD3
Measurement Range (See Note 1)
0 to 250 Pa
± 50 Pa
± 500 Pa
Calibration Gas (See Note 2)
Air
Port Type
Barb joint, Maximum outside diameter: 4.9mm
Power Supply
2.3 to 3.6 VDC
Current Consumption
Resolution
6 mA max. with no load and V_CC of 3.3 V, GND=0 VDC, 25°C
12 bit
Zero Point Tolerance (See Note 4)
± 0.2 Pa
Span Tolerance (See Note 4)
± 3% R.D.
Temperature Compensation
Yes
Span shift due to Temperature Variation
± 0.5% R.D. per 10°C
Response Time
25 ms typical at 12 bit resolution (50 ms max). The processing time is 6 ms typical at 12 bit resolution.
Gas Flow through Sensor (See Note 3)
≤ 63 mL/min
≤ 23 mL/min
≤ 100 mL/min
Interface
I²C
Case Material
PPS
Degree of Protection
IEC IP40
Withstand Pressure
10 kPa
Operating Temperature
-20 to 80°C (with no condensation or icing)
Operating Humidity
35 to 85% RH (with no condensation or icing)
Storage Temperature
-40 to 80°C (with no condensation or icing)
Storage Humidity
35 to 85% RH (with no condensation or icing)
Insulation Resistance
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
5.2 g
Note: 1. At standard atmospheric pressure (1013.25 hPa).
2. Dry gas must not contain large particles, e.g., dust, oil or mist.
3. Type D6F-PH is based on thermal flow principle. Air flow is needed to measure the differential pressure. Typical characteristic of air flow
by differential pressure is shown in the “Engineering Data” section.
4. The zero point tolerance and span tolerance are independent uncertainties and add according to the principles of error propagation.
MEMS Differential Pressure Sensor D6F-PH
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