D6F-10A_10 Datasheet, PDF (1/6 Pages) Omron Electronics LLC – MEMS Airflow Sensor

MEMS Airflow Sensor
D6F-10A, -20A, -50A
Compact, intelligent sensor featuring
MEMS technology for precision mass
airflow measurement
• Precision mass airflow up to 50 LPM
• Stable output across full scale
• Manifold mounting feature with NBR ‘O’ ring option
• Compact size 78 (L) x 30 (W) x 30 (H) mm
• Low power consumption
• RoHS Compliant
Ordering Information
Description
Mass Flow Sensor
Case
Applicable Gas
Thermoplastic resin
Air*
/ Aluminum alloy
Cable Connector Assembly
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Flow Range**
0 – 10 LPM
0 – 20 LPM
0 – 50 LPM
0 – 10 LPM
0 – 20 LPM
0 – 50 LPM
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Note: Cable Assembly is sold separately.
* Contact Omron for other gases or thread types.
**Mass flow converted to volumetric flow (standard liters per minute) at 0°C and 1 atm.
Connection Type
Model
Right-angle manifold
mount connection
D6F-10A5-000
D6F-20A5-000
D6F-50A5-000
Straight RC1/4 (1/4” BSPT) D6F-10A6-000
threaded pipe*
D6F-20A6-000
D6F-50A6-000
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D6F-CABLE1
■ Application Examples
• Industrial processes
• Medical Respirators and Ventilators
• MiG and TiG welding systems
• Anesthesia Delivery
• Mass flow controllers
• Scientific / test equipment
• Fuel cell controls
Rating
■ Absolute maximum rating
Item
Power supply
Output voltage
Symbol
V_CC
V_OUT
■ Electrical Performance
Ratings
26.4
6
Item
Power supply
Operating temperature
Output voltage (max.)
Output voltage (min.)
Term
V_CC
T_OPR
V_OH
V_OL
Condition
—
No condensation or icing
V_CC = 12 to 24VDC I_OH = 0.5mA
V_CC = 12 to 24VDC I_OL = -0.5mA
MIN
10.8
-10
5
0
Unit
VDC
VDC
MAX
26.4
60
5.7
1
Unit
VDC
°C
VDC
VDC
MEMS Airflow Sensor D6F-10A, -20A, -50A
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