D6F-03A3-000_10 Datasheet, PDF (1/4 Pages) Omron Electronics LLC – MEMS Mass Flow Sensor

MEMS Mass Flow Sensor
D6F-03A3-000
Compact, sensors featuring MEMS
technology for precision mass airflow
measurement.
• Precision unidirectional mass airflow up to 3 LPM
• Fast Response (< 5 msec, typical)
• Ultra-compact size 36.6 (L) x 8 (W) x 16.8 (H) mm
• Low power consumption
• RoHS Compliant
Ordering Information
Description
Mass Flow Sensor
Cable Connector Assembly
Case
Thermoplastic resin / Aluminum Alloy
---
Applicable gas
Air*
---
Note: Cable Assembly is sold separately.
* Contact Omron for other gases.
**Mass flow converted to volumetric flow (standard liters per minute) at 0°C and 1 atm.
Flow range**
0-3L/min
---
■ Application examples
• Pick and place systems
• Industrial processes
• Leak detection
• Spectroscopy
• Mass flow controllers
• Scientific / test equipment
• Environmental comfort controls
• Fuel cell controls
Model
D6F-03A3-000
D6F-CABLE2
Ratings
■ Absolute Maximum Rating
Item
Power supply
Output voltage
Symbol
V_CC
V_OUT
■ Electrical Performance
Rating
26.4
6
Item
Power supply
Operating temperature
Output voltage (max.)
Output voltage (min.)
Symbol
V_CC
T_OPR
V_OH
V_OL
Condition
—
No condensation or icing
Load resistance: 10kΩ
Load resistance: 10kΩ
Min.
10.8
0
5
0
Unit
VDC
VDC
Max.
26.4
50
5.7
1
Unit
VDC
°C
VDC
VDC
MEMS Mass Flow Sensor D6F-03A3-000
19