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D6F-01N Datasheet, PDF (1/6 Pages) Omron Electronics LLC – MEMS Flow Sensor
MEMS Flow Sensor
D6F-01N/02L/05N
High Accuracy Mass Flow Sensing for
Natural Gas and Propane Applications
• Small size
• Fast response
• Applicable to air, non-corrosive gas, natural gas and propane
• Applications include: analysis apparatus, combustion control
Ordering Information
Case
Aluminum
Calibration gas
Natural Gas*
Propane Gas*
Natural Gas*
Flow range**
0-1L/min
0-2L/min
0-5L/min
* Contact Omron for other gases.
**Mass flow converted to volumetric flow (standard liters per minute) at 0° C and 1 atm.
Ratings
Model
D6F-01N2-000
D6F-02L2-000
D6F-05N2-000
■ Absolute Maximum Rating
Item
Power supply
Output voltage
Symbol
VCC
VOUT
Rating
26.4
6
■ Electrical Performance
Item
Power supply
Operating temperature
Output voltage (max.)
Output voltage (min.)
Symbol
VCC
TORR
VOH
VOL
Condition
—
—
VCC = 12 to 24 VDC IOH = 5 mA
VCC = 12 to 24 VDC IOH = 5mA
Min.
10.8
-10
5
0
Unit
VDC
VDC
Max.
26.4
60
5.7
1
Unit
VDC
°C
VDC
VDC
Operating Characteristics
D6F-01N2-000
6.0
5.0
4.0
3.0
2.0
1.0
0.0
0.0
0.2
0.4
0.6
0.8
1.0
Flow rate(L/min)
D6F-02L2-000
6.0
5.0
4.0
3.0
2.0
1.0
0.0
0.0
0.4
0.8
1.2
1.6
2.0
Flow rate(L/min)
D6F-05N2-000
6.0
5.0
4.0
3.0
2.0
1.0
0.0
0.0
1.0
2.0
3.0
4.0
5.0
Flow rate(L/min)
MEMS Flow Sensor D6F-01N/02L/05N
1