D6F-01A1-110 Datasheet, PDF (1/3 Pages) Omron Electronics LLC – MEMS Flow Sensor

D6F MEMS Flow Sensor
High accuracy mass flow sensing
■ Small size
■ Fast response
■ Applicable to air, non-corrosive gas, LNG
D6F
Ordering Information
Model
D6F-01A1-110
D6F-02A1-110
D6F-05N2-000
Case
PPS
Aluminum
Gsa
Air*
LNG* (13A)
Flow Range
0-1L/min
0-2L/min
0-5L/min
Notes
Integral orifice
Application Examples
• Medical equipment
• Analysis apparatus
• Combustion control
Ratings
Absolute Maximum Rating
Item
Power Supply
Output Voltage
V_CC
V_OUT
Symbol
Rating
26.4
6
Unit
VDC
VDC
Recommendation Condition
Item
Symbol
Condition
Min.
Power Supply
V_CC
Operating Temperature T_ORR
Output Voltage (Max.) V_OH
Output Voltage (Min.) V_OL
–
10.8
–
-10
V_{CC =} 12 to 24VDC I_OH = 5mA 5
V_{CC =} 12 to 24VDC I_OH =-5mA 0
Typ.
–
–
–
–
Max.
26.4
60
5.7
1
Unit
VDC
°C
VDC
VDC