D6F-01 Datasheet, PDF (1/6 Pages) Omron Electronics LLC – MEMS Flow Sensor

MEMS Flow Sensor
D6F-01/02
High Accuracy Mass Flow Sensing
• Small size
• Fast response
• Applicable to air, non-corrosive gas
• Applications include: medical respiratory equipment,
analysis apparatus
Ordering Information
Case
Gas
PPS
Air*
Flow range**
0-1L/min
0-2L/min
Notes
Integral orifice
* Contact Omron for other gases.
**Mass flow converted to volumetric flow (standard liters per minute) at 0°C and 1 atm.
Ratings
■ Absolute Maximum Rating
Item
Power supply
Output voltage
Symbol
V_CC
V_OUT
Rating
26.4
6
■ Electrical Performance
Item
Power supply
Operating temperature
Output voltage (max.)
Output voltage (min.)
Symbol
V_CC
T_ORR
V_OH
V_OL
Condition
Min.
—
10.8
—
-10
V_CC = 12 to 24 VDC I_OH = 5 mA 5
V_CC = 12 to 24 VDC I_OH = 5mA 0
Typ.
—
—
—
—
Model
D6F-01A1-110
D6F-02A1-110
Unit
VDC
VDC
Max.
26.4
60
5.7
1
Unit
VDC
°C
VDC
VDC
MEMS Flow Sensor D6F-01/02
1